Abstract: Based on the X-ray diffraction results, the textures of aluminium nitride films were investigated by using the pole-figure method. Aluminium nitride thin films prepared have a high (002) plane texture, and most of the c-axis of particles are parallel with the normal of the substrate. Aluminium nitride thin films with (100) orientation are necessary, as they are applied to surface acoustic wave devices, and the pole-figure results are very useful for determining the c-axis of particles direction in the A1N (100) thin films.

Key words: aluminium nitride thin films, pole-figure method, texture