Environmental Stable SiO2 Antireflective Coating Modified via NH3/HTMS Vapor Phase Treatment

doi:10.15541/jim20180033

Abstract

Abstract:

Sol-Gel derived silica antireflective coatings have been widely used in high power laser system because of their ultra-low refractive index and high laser damage threshold. However, water vapor and volatile organic compounds in the laser system contaminate these coatings and reduce their antireflective efficiency and laser damage resistance. In this work, environmental stable SiO₂ antireflective coating was prepared by vapor phase treatment of ammonia and HTMS. Monodisperse colloidal silica sol was synthesized by Sol-Gel method using tetraethylorthosilicate (TEOS) as precursor, ammonia as catalyst, and ethanol as solvent. The silica coatings were then deposited on the BK7 glass using dip-coating method. Ammonia vapor phase treatment and HTMS vapor phase treatment were combined to improve the environmental stability of the antireflective coating. The peak transmittance of the BK7 glass coated with the modified coating decreased only 0.03% after being exposed in the humid environment for 2 m. Meanwhile, the transmittance curve of the BK7 glass coated with modified coating had almost no change after being placed under low vacuum condition with oil pollutants for 2 m, indicating that the coating modified via combined vapor phase treatment of ammonia and HTMS possessed an excellent environmental stable performance. Therefore, the combination of ammonia and HTMS vapor phase treatment is effective to improve the working life of SiO₂ antireflective coating in high power laser system.

Key words: Sol-Gel, environmental stability, antireflective coating, vapor phase treatment

CLC Number:

O484

ZHAO Hui-Yue, WANG Xiao-Dong, FENG Jian-Bin, LIU Yuan, HUANG Ji-Chen, SHEN Jun. Environmental Stable SiO₂Antireflective Coating Modified via NH₃/HTMS Vapor Phase Treatment[J]. Journal of Inorganic Materials, 2018, 33(11): 1219-1224.

Figures/Tables 6

Fig. 1 Diagram of SiO2 coating modified via (a) ammonia vapor phase treatment and (b) HTMS vapor phase treatment

Fig. 2 Schematic diagram of SiO2 coating modified via (a) ammonia vapor phase treatment and (b) HTMS vapor phase treatment

Fig. 3 FT-IR spectra of unmodified SiO2 coating (Base-SiO2), SiO2 coating modified via ammonia vapor phase treatment (NH3-6h-SiO2) and NH3/HTMS vapor phase treatment (NH3-6h-HTMS-12h-SiO2)

Fig. 4 SEM surface and cross-section images of unmodified SiO2 coating (a), SiO2 coating modified via ammonia vapor phase treatment (b) and NH3/HTMS vapor phase treatment (c)

Fig. 5 (a) Transmittance spectra and (b) refractive index spectra of unmodified SiO2 coating (Base-SiO2), SiO2 coating modified via ammonia vapor phase treatment (NH3-6h-SiO2) and NH3/HTMS vapor phase treatment (NH3-6h-HTMS-12h-SiO2)

Fig. 6 Transmittance spectra of (a) unmodified SiO2 coating and (b) SiO2 coating modified via NH3/HTMS vapor phase treatment after being exposed in the humid environment; Transmittance spectra of (c) unmodified SiO2 coating and (d) SiO2 coating modified via NH3/HTMS vapor phase treatment after being placed under low vacuum condition with oil pollutants

References 33

[1]	SUN JING-HUA, LV HAI-BING, WU DONG, et al.Preparation of silica optical antireflective films by Sol-Gel process.Materials Review, 2013, 27(9): 15-37.
[2]	WU GUANG-MING, SHEN JUN, WU YU, et al.Strengthening investigation of anti-reflective nano-porous silica films derived by base/acid two-step Sol-Gel process and mixed atmosphere treatment.Atomic Energy Science and Technology, 2002, 36(z1): 374-379.
[3]	STÖBER WERNER, FINK ARTHUR, BOHN ERNST. Controlled growth of monodisperse silica spheres in the micron size range.Journal of Colloid and Interface Science, 1968, 26(1): 62-69.
[4]	WANG XIAO-DONG, SHEN JUN.A review of contamination- resistant antireflective Sol-Gel coatings.Journal of Sol-Gel Science and Technology, 2012, 61(1): 206-212.
[5]	ZHANG QING-HUA, ZHOU LIAN, YANG WEI, et al. Sol-Gel preparation of a silica antireflective coating with enhanced hydrophobicity and optical stability in vacuum. Chinese Optics Letters, 2014, 12(7): 071601-1-4.
[6]	ZHANG XIN-XIANG, ZHUANG MENG-YUN, MIAO XIA, et al.Environment-resistant fluoro-containing antireflective coatings for high-powered laser systems.RSC Advances, 2014, 4(90): 48872-48875.
[7]	ZHANG XIN-XIANG, LIN MING-YUE, LIN LI-XIAO, et al.Sol-Gel preparation of fluoro-containing ORMOSIL antireflective coating with resistance simultaneously to hydrophilic and oleophilic pollutants.Journal of Sol-Gel Science and Technology, 2015, 74(3): 698-706.
[8]	ZHANG QING-HUA, WEI YAO-WEI, YANG WEI, et al.Improvement on contamination resistance to volatile organics and moisture of Sol-Gel silica antireflective coating for 351 nm laser system by structural modulation with fluorinated compounds.RSC Advances, 2014, 5(6): 4529-4536.
[9]	YAN LIANG-HONG, CHI FANG-TING, JIANG XIAO-DONG, et al.Preparation of hydro-oleophobic silica antireflective coating.Journal of Inorganic Materials, 2007, 22(6): 1247-1250.
[10]	NIU YAN-YAN, WANG XIAO-DONG, YAO LAN-FANG, et al.Preparation of octyltrimethoxysilane modified SiO2 hydrophobic antireflective coating.Journal of Inorganic Materials, 2016, 31(5): 499-504.
[11]	LI HAI-YUAN, TANG YONG-XING.Study on stability of porous silica antireflective coatings prepared by Sol-Gel processing dash with organic silica.Chinese Journal of Lasers, 2006, 33(1): 116-119.
[12]	ZHANG YU-LU, ZHANG XIN-XIANG, YE HAI-PING, et al.A simple route to prepare crack-free thick antireflective silica coatings with improved antireflective stability.Materials Letters, 2012, 69(4): 86-88.
[13]	ZHANG XIN-XIANG, XIA BI-BO, YE HAI-PING, et al.One-step Sol-Gel preparation of PDMS-silica ORMOSILs as environment- resistant and crack-free thick antireflective coatings.Journal of Materials Chemistry, 2012, 22(26): 13132-13140.
[14]	ZHANG XIN-XIANG, ZHENG FENG, YE LONG-QIANG, et al.A one-pot Sol-Gel process to prepare a superhydrophobic and environment-resistant thin film from ORMOSIL nanoparticles.RSC Advances, 2014, 4(19): 9838-9841.
[15]	YUAN Y, YAN G H, HUANG S H, et al.Preparation of hydrophobic SiO2/PMHS sol and ORMOSIL antireflective films for solar glass cover.Solar Energy, 2016, 130: 1-9.
[16]	YUAN YE, YAN GENG-HUA, LIU SHAO-ZHE, et al.Hydrophobic, ultra-low refractive index films prepared by Sol-Gel process. Materials Letters, 2016, 184: 305-307.
[17]	TAO CHAO-YOU, YAN HONG-WEI, YUAN XIAO-DONG, et al.Detailed analysis and formation mechanism of superhydrophobic antireflective coatings with adjustable refractive index from trimethylsilanized silica nanoparticles.Journal of Sol-Gel Science and Technology, 2016, 80(1): 1-9.
[18]	LIU YUAN, SHEN JUN, ZHOU BIN, et al.Effect of hydrophobicity on the stability of Sol-Gel silica coatings in vacuum and their laser damage threshold.Journal of Sol-Gel Science and Technology, 2013, 68(1): 81-87.
[19]	ZHANG XIN-XIANG, CAO CONG-RUI, XIAO BO, et al.Preparation and characterization of polyvinyl butyral/silica hybrid antireflective coating: effect of PVB on moisture-resistance and hydrophobicity.Journal of Sol-Gel Science and Technology, 2010, 53(1): 79-84.
[20]	XIAO BO, ZHANG YU-LU, ZHANG XIN-XIANG, et al.Focus on moisture-resistance and hydrophobicity of SiO2 antireflective film improved by poly(isopropylene oxide) glycerolether.Journal of Sol-Gel Science and Technology, 2011, 60(1): 11-16.
[21]	MARSHALL K L, ASHE B, RIGATTI A L, et al. Vapor- phase-deposited organosilane coatings as hardening agents for high-peak-power laser optics.Proceedings of SPIE-The International Society for Optical Engineering, 2007, 6674: 667407-1-11.
[22]	WU BAO-HU, WU DONG, JIA HONG-BAO, et al.Fluoroalkyl- grafted mesoporous silica antireflective films with enhanced stability in vacuum.Optics Letters, 2012, 37(19): 4095-4097.
[23]	SUN JING-HUA, ZHANG QING-HUA, DING RUI-MIN, et al.Contamination-resistant silica antireflective coating with closed ordered mesopores.Physical Chemistry Chemical Physic, 2014, 16(31): 16684-16693.
[24]	SUN JING-HUA, ZHANG CE, ZHANG CONG, et al.Effect of post-treatment on ordered mesoporous silica antireflective coating.RSC Advances, 2014, 4(92): 50873-50881.
[25]	SUN JING-HUA, CUI XIN-MIN, ZHANG CE, et al.A broadband antireflective coating based on a double-layer system containing mesoporous silica and nanoporous silica.Journal of Materials Chemistry, 2015, 3(27): 7187-7194.
[26]	HUO YAN-FANG, LUO RONG-HUI, SU YONG-GANG.Comparison of base-catalyzed silica antireflective coatings modification by different surface treatments of water-NH3 and/or hexamethyldisilazane vapors.Acta Photonica Sinica, 2013, 42(7): 823-827.
[27]	SHEN JUN, LIU YUAN, LI XIAO-GUANG.Surface modification and contamination resistantce of Sol-Gel SiO2 derived antireflective coatings.Journal of the Chinese Ceramic Society, 2010, 38(11): 2054-2058.
[28]	LI XIAO-GUANG, SHEN JUN.The stability of Sol-Gel silica coatings in vacuum with organic contaminants.Journal of Sol-Gel Science and Technology, 2011, 59(3): 539-545.
[29]	VOORHEES P W.The theory of Ostwald ripening.Journal of Statistical Physics, 1985, 38(1/2): 231-252.
[30]	ZHANG XIN-XIANG, SU WEN-MU, LIN MING-YUE, et al.Non-supercritical drying Sol-Gel preparation of superhydrophobic aerogel ORMOSIL thin films with controlled refractive index.Journal of Sol-Gel Science and Technology, 2015, 74(3): 594-602.
[31]	RUI M,ALMEIDA, PANTANO CARL G. Structural investigation of silica gel films by infrared spectroscopy.Journal of Applied Physics, 1990, 68(8): 4225-4232.
[32]	GONCALVES GIL, MARQUES PAULA A A P, PINTO RICARDO J B, et al. Surface modification of cellulosic fibres for multi-purpose TiO2 based nanocomposites.Composites Science and Technology, 2009, 69(7/8): 1051-1056.
[33]	MACLEOD H, ANGUS. Thin-film Optical Filters. Fourth Edition. Tucsou, Arizona,USA: Thin Film Center Incorporated, 2010, 106-112.

Environmental Stable SiO₂Antireflective Coating Modified via NH₃/HTMS Vapor Phase Treatment

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