Synthesis of Carbon Nanotube Junction by ECR-CVD

doi:10.3724/SP.J.1077.2006.01244

Abstract

Abstract: A new type of nanotube junction was synthesized with CH₄/H₂ and CH ₄/B₂H₆/H₂source gases in a continuous CVD process by electron cyclotron resonance chemical vapor deposition (ECR-CVD), Fe₃O₄ nanoparticle as the
catalyst and porous silicon as the substrate. Scanning electron microscope
(SEM) and transmission electron microscope (TEM) were used to evaluate the
morphology and structure. The result shows that the junction is joined with
a bamboo-like boron-doped CNT at one side and a straight tubular CNT at
another side. The junction grows via bottom-end growth mechanism, boron-doped CNT growing in first period is on the top of the nanotube junction.

Key words: ECR-CVD, junction, carbon nanotube, boron-dopedenddocument

CLC Number:

TB383

WANG Zhi,BA De-Chun,YU Chun-Hong,LIANG Ji. Synthesis of Carbon Nanotube Junction by ECR-CVD[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2006.01244.

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Synthesis of Carbon Nanotube Junction by ECR-CVD

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