高级检索
无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

无团聚HfO2纳米粉体的湿化学法制备及性能表征

吴智华1; 蒋丹宇2; 刘健敏1; 吉亚明2; 史伟民1; 张骋1   

  1. 1. 上海大学电子信息材料系, 上海 201800; 2. 中国科学院上海硅酸盐研究所, 上海 200050
  • 收稿日期:2003-09-08 修回日期:2003-11-03 出版日期:2004-09-20 网络出版日期:2004-09-20

Preparation and Property Characteristics of Non-agglomerated HfO2 Nano Powders by Wet Chemical Method

WU Zhi-Hua1; JIANG Dan-Yu2; LIU Jian-Min1; JI Ya-Ming2; SHI Wei-Min1; ZHANG Cheng1   

  1. 1. Department of Electronic Information Materials; Shanghai University; Shanghai 201800; China; 2. Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China
  • Received:2003-09-08 Revised:2003-11-03 Published:2004-09-20 Online:2004-09-20

PDF (PC)

1120

摘要： 以化学沉淀法制备HfO2纳米粉体,借助XRD、SEM、TEM、BET、激光粒度测试仪等测试方法研究了不同制备工艺对HfO2纳米粉料团聚状态的影响.采用初始浓度0.5mol/L的溶液,稳定溶液pH为9、添加表面活性剂PEG、用无水乙醇处理水洗后的湿凝胶、在700℃下煅烧,能制备无团聚,平均粒径为25nm,呈正交晶型的HfO2纳米粉体.200MPa冷等静压成型的素坯在氢气中1800℃保温2h得到96％理论密度的主相为正交相,有少量单斜相存在的HfO2陶瓷烧结体.

关键词: 化学沉淀法, HfO2纳米粉体, 团聚体, 烧结

Abstract: HfO2 nano powders were prepared by the chemical precipitant method. The influence of different preparation
parameters on the agglomeration was investigated by X-ray diffraction analysis (XRD), scanning electron microscopy (SEM), transmission electron microscopy
(TEM), BET surface area techniques and laser particle analyzer. Non-agglomerated orthorhombic, HfO2 powders with a size of about 25nm
can be obtained by controlling starting concentration and pH values of solution, adding surfactants, washing gels with alcohol and calcining
at 700℃. Orthorhombic HfO2 ceramics of 96% theoretical density can be prepared by sintering at 1800℃ for 2h in hydrogen. The results
show that there are both o-HfO2 and m-HfO2 in the sample, mainly o-HfO2.

Key words: chemical precipitant method, non-agglomerate, HfO2 nano powder, sinter

中图分类号: