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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

反应烧结Si3N4陶瓷微型转子的制备

李敬锋1; 杉木真也2; 田中秀治2; 江刺正喜2   

  1. 1. 清华大学材料科学与工程系新型陶瓷与精细工艺国家实验室, 北京 100084; 2. 东北大学大学院工学研究科机械电子工学专攻 北京; 仙台 980—8579;
  • 收稿日期:2002-07-29 修回日期:2002-09-17 出版日期:2003-09-20 网络出版日期:2003-09-20

Fabrication of Reaction-Sintered SisN4 Ceramic Microrotors

LI Jing-Feng; Sugimoto Shinya; Tanaka Shuji; Esashi Masayoshi   

  1. 1. Key State Laboratory of New Ceramics and Fine Processing; Department of Materials Science and Engineering; Tsinghua University; Beijing 100084; China; 2. Department of Mechatronics and Precision Engineering; Graduate School of Engineering; Tohoku University; Sendai 980-8579; Japan
  • Received:2002-07-29 Revised:2002-09-17 Published:2003-09-20 Online:2003-09-20

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摘要： 介绍了一种适合于制备Si3N4陶瓷微细部件的微细制备技术.该技术主要包括Si粉的预烧结成形和微型加工以及反应烧结等三部分,结合了Si粉预烧结体的可加工性和Si3N4反应烧结所具有的近净尺寸成形特点,具有制备Si3N4陶瓷三维微细部件的优势.本研究利用该技术成功地制备了直径5mm、厚度1.2mm、叶片厚度大约70μm的Si3N4陶瓷微型转子.

关键词: 陶瓷MEMS, 微型器件, 微制造, 氮化硅, 陶瓷转子

Abstract: This paper introduces a novel process for the microfabrication of Si3N4 ceramic microcomponents, which mainly consists of pre-sintering of Si powder
compacts, micromachining of pre-sintered Si performs and reaction sintering of the micromachined Si performs. The present process has its high potential for
Si3N4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of Si3N4
reaction sintering. Using this process, we fabricated a reaction-sintered Si3N4 ceramic micro-turbine rotor that has a 5mm diameter, 1.2mm thickness, and whose blades are as thin as 70μm.

Key words: ceramic MEMS, microdevices, microfabrication, silicon nitride, ceramic turbine rotor

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