无机材料学报

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Lanxide技术合成含烧结助剂的复合AIN粉体

林志浪1,3; 郑新和2; 王群3; 周美玲3   

  1. 1. 中国科学院上海微系统与信息技术研究所离子束重点实验室, 上海 200050; 2. 中国科学院半导体研究所, 北京 100083; 3. 北京工业大学材料科学与工程学院, 北京 100022
  • 收稿日期:2002-10-18 修回日期:2002-12-06 出版日期:2003-11-20 网络出版日期:2003-11-20

Synthesis of Composite AIN Powder Mixed with Sintering Additives by the Lanxide Method

LIN Zhi-Lang1,3; ZHENG Xin-He2; WANG Qun3; ZHOU Mei-Ling3   

  1. 1. Ion Beam Laboratory; Shanghai Institute of Microsystem and Information Technology; Chinese Academy of Sciences; Shanghai 200050; China; 2. Institute of Semiconductors; Beijing 100083, China; 3. School of Materials Science and Engineering; Beijing Polytechnic University; Beijing 100022; China
  • Received:2002-10-18 Revised:2002-12-06 Published:2003-11-20 Online:2003-11-20

摘要: 高纯度的氮气中,以Al-Mg-Y合金为母合金,利用Lanxide技术合成了含烧结助剂Y2O3的复合AIN粉体.通过扫描电镜、X射线衍射、粒径分析及化学成分分析等检测手段对氮化产物进行表征.实验结果表明,合金氮化反应完全,氮化产物疏松易于粉化.粉化后获得的复合AIN粉体具有纯度高,氧杂质含量低,粒度细小等优点.

关键词: AIN粉体, Lanxide技术, 铝合金, 烧结助剂

Abstract: Composite AlN powder, mixed with the sintering additive Y_2O_3, was synthesized by the direct
nitridation of molten Al-Mg-Y alloys. The character of products was determined by means of electron microscopy, X-ray diffraction,
granularmetric analysis and chemical composition analysis etc. The results show that the nitridation rate of the raw alloys is higher,
and the nitridation products are porous enough to be easily crushed. Composite AlN powder, obtained by the Lanxide method, has excellent
characters such as high purity, especially low oxygen content, and narrow well-distributed grain size and so on.

Key words: AIN powder, Lanxide method, aluminium alloys, sintering additives

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