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无机材料学报

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应用于MEMS的PZT铁电薄膜

于晓, 张之圣, 胡明   

  1. 天津大学电子信息工程学院, 天津 300072
  • 收稿日期:2003-12-29 修回日期:2004-03-19 出版日期:2005-01-20 网络出版日期:2005-01-20

PZT Ferroelectrics Thin Films Used in MEMS

YU Xiao, ZHANG Zhi-Sheng, HU Ming   

  1. School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China
  • Received:2003-12-29 Revised:2004-03-19 Published:2005-01-20 Online:2005-01-20

PDF (PC)

1301

被引次数

3

摘要： 薄膜制备工艺的发展使铁电薄膜很好的应用于MEMS, 使两者集成成为可能. 本文将详细论述铁电薄膜的优良性能, 及其与MEMS集成的关键工艺--图形化. 最后, 举例论述了PZT铁电薄膜在MEMS中的应用.

关键词: MEMS, 铁电薄膜, PZT, 微细加工技术, 图形化

Abstract: With the development of thin film fabrication processes, there are many ferroelectrics thin films applied in MEMS. The fabrication of MEMS devices using ferroelectrics thin films
depends upon the ability to pattern the films. The useful properties of ferroelectrics thin films, especially PZT thin films, were introduced,
and some examples about the MEMS based on the ferroelectrics thin films were discussed.

Key words: MEMS, ferroelectrics thin films, PZT, micro fabrication, pattern

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