无氟MOD法制备YBCO超导薄膜工艺中物相的演变过程

doi:10.15541/jim20170389

无机材料学报 ›› 2018, Vol. 33 ›› Issue (7): 773-778.DOI: 10.15541/jim20170389 CSTR: 32189.14.10.15541/jim20170389

无氟MOD法制备YBCO超导薄膜工艺中物相的演变过程

左珺凉¹, 赵跃^1,2, 吴蔚^1,2, 储静远¹, 张智巍^1,2, 洪智勇^1,2, 金之俭¹

1. 上海交通大学电子信息与电气工程学院, 上海 200240;
2. 上海超导科技股份有限公司, 上海 210203

收稿日期:2017-08-09 修回日期:2017-10-27 出版日期:2018-07-10 网络出版日期:2018-06-19
作者简介:左珺凉(1993-), 男, 硕士研究生. E-mail: zuojunliang@sjtu.edu.cn
基金资助:
国家自然科学基金青年项目(51502171);上海市科学技术委员会科研计划项目(16521108300);National Natural Science Foundation of China (51502171);Science and Technology Commission of Shanghai Municipality (16521108300)

Intermediate Phase Evolution in YBCO Superconducting Film Fabricated by Fluorine Free MOD Method

ZUO Jun-Liang¹, ZHAO Yue^1,2, WU Wei^1,2, CHU Jing-Yuan¹, ZHANG Zhi-Wei^1,2, HONG Zhi-Yong^1,2, JIN Zhi-Jian¹

1. School of Electronic Information and Electrical Engineering, Shanghai Jiaotong University, Shanghai 200240, China;
2. Shanghai Superconductor Technology Co., Ltd, Shanghai 210203, China

Received:2017-08-09 Revised:2017-10-27 Published:2018-07-10 Online:2018-06-19
About author:ZUO Jun-Liang. E-mail: zuojunliang@sjtu.edu.cn

摘要/Abstract

摘要：

第二代高温超导带材在电力系统和磁体领域拥有良好的应用前景, 无氟金属有机盐沉积技术(FF-MOD)以其设备成本低、晶体生长速率快、环境友好等特点, 成为研究热点。本研究通过FF-MOD技术, 在铝酸镧单晶和CeO₂/IBAD-MgO/Y₂O₃/Al₂O₃/Hastelloy C276人工基板上制备得到钇钡铜氧(YBCO)薄膜, 并对不同制备温度下的样品进行淬火, 随后对淬火样品进行了X射线衍射、扫描电子显微镜和衰减全反射红外光谱的表征, 系统地研究了高温成相过程中BaCO₃和YBCO的相演变过程。实验结果表明, 在YBCO成相过程中, BaCO₃不会与Y、Cu元素的氧化物反应直接生成YBCO晶体, 并生成的YBCO相晶体先呈随机取向, 然后在热处理的过程中(800℃左右)逐渐转化为具有双轴织构的YBCO晶体。

关键词: 第二代高温超导带材, YBCO, 相演变, FF-MOD

Abstract:

The second generation of high temperature superconducting tape is considered to be a promising material for future power and magnet applications. Among the fabrication processes, Fluorine Free-Metal Organic Deposition (FF-MOD) method has received much attention in recent years because of its low equipment requirements, high crystal growth rate, and environmental friendliness. In present study, yttrium barium copper oxide (YBCO) films were prepared on the LAO single crystals and CeO₂/IBAD-MgO/Y₂O₃/Al₂O₃/Hastelloy C276 technical substrates by the FF-MOD technique. The samples were quenched at different temperatures and then characterized by X-ray diffraction, scanning electron microscope and ATR-FT-IR to inveitigate the phase evolution process of YBCO and BaCO₃. The results demonstrate that YBCO crystal does not formed directly by reaction between BaCO₃ and Y/Cu oxides. And the formed YBCO crystals are randomly oriented at first, and then gradually convert into the biaxially textured structure during the heat treatment process at about 800℃.

Key words: 2G-HTS, YBCO, FF-MOD, phase evolution

中图分类号:

TQ174

左珺凉, 赵跃, 吴蔚, 储静远, 张智巍, 洪智勇, 金之俭. 无氟MOD法制备YBCO超导薄膜工艺中物相的演变过程[J]. 无机材料学报, 2018, 33(7): 773-778.

ZUO Jun-Liang, ZHAO Yue, WU Wei, CHU Jing-Yuan, ZHANG Zhi-Wei, HONG Zhi-Yong, JIN Zhi-Jian. Intermediate Phase Evolution in YBCO Superconducting Film Fabricated by Fluorine Free MOD Method[J]. Journal of Inorganic Materials, 2018, 33(7): 773-778.

图/表 6

图1 热处理过程温度-气氛示意图

Fig. 1 Diagram of temperature-atmosphere in heat treatment process

图2 不同温度下淬火的单晶基底样品的XRD图谱和SEM照片

Fig. 2 XRD patterns and SEM images of samples on LAO substrate quenched at different temperatures (a) 600℃; (b) 680℃; (c) 720℃; (d) 780℃; (e) 810℃

图3 不同温度下淬火的人工基板样品的XRD图谱和SEM照片

Fig. 3 XRD patterns and SEM images on samples quenched at different temperatures on technical substrate(a) 640℃; (b) 660℃; (c) 680℃; (d) 720℃; (e) 760℃; (f) 800℃

图4 人工基板上不同温度淬火样品的红外吸收图谱

Fig. 4 Infrared absorption spectra on samples quenched at different temperatures on artificial substrate

图5 人工基板上薄膜样品的SEM照片

Fig. 5 SEM image on sample prepared on technical substrate

参考文献 22

[1]	VAN DER LAAN D C, EKIN J W. Dependence of the critical current of YBa2Cu3O7-δ coated conductors on in-plane bending. Superconductor Science and Technology, 2008, 21: 115002-1-6.
[2]	LAAN D C V D, EKIN J W, CLICKNER C C,et al.Delamination strength of YBCO coated conductors under transverse tensile stress.Superconductor Science and Technology, 2007, 20(8): 765-770.
[3]	HAO CENGCENG, TANG YUEJIN, JIAO SHUNFENG,et al.Critical current of HTS tape under tensile stress.Cryogenics & Superconductivity, 2013, 41(6): 17-21.
[4]	NASUI M, PETRISOR T, MOS R B,et al.Fluorine-free propionate route for the chemical solution deposition of YBa2Cu3O7-x superconducting films.Ceramics International, 2015, 41(3): 4416-4421.
[5]	ZHAO YUE, TANG XIAO, WU WEI,et al.Influence of substrate- film reactions on YBCO grown by fluorine-free MOD route.IEEE Transactions on Applied Superconductivity, 2017, 27: 1-4.
[6]	PARMIGIANI F, CHIARELLO G, RIPAMONTI N.et al.Observation of carboxylic groups in the lattice of sintered Ba2YCu3O7-y high-Tc superconductors.Physical Review B, 1987, 36(13): 7148-7150.
[7]	KUMAGAI T M T, YAMAGUCHI I, KONDO W, ,et al. Preparation of 2-inch-diameter double-sided YBa2Cu3O7 films by coating- pyrolysis process. Physica C: Superconductivity. Preparation of 2-inch-diameter double-sided YBa2Cu3O7 films by coating- pyrolysis process. Physica C: Superconductivity, 2001, 357- 360(2): 1346-1349.
[8]	GUPTA A, JAGANNATHAN R, COOPER E I,et al.Superconducting oxide films with high transition temperature prepared from metal trifluoroacetate precursors.Applied Physics Letters, 1988, 52(24): 2077-2079.
[9]	SRIVATSAN SATHYAMURTHY C T A M W R. Materials Research for Manufacturing. Springer Series in Materials Science, 2016, 224: 36.
[10]	SHI DONGLU, XU YONGLI, YAO HAIBO,et al.The development of Y Ba2Cu3Ox thin films using a fluorine-free Sol-Gel approach for coated conductors.Superconductor Science and Technology, 2004, 17(12): 1420-1425.
[11]	WU WEI, FENG FENG, SHI KAI, ,et al. . A rapid process of YBa2Cu3O7-δ thin film fabrication using trifluoroacetate metal-organic deposition with polyethylene glycol additive. Superconductor Science and Technology, 2013, 26(5): 055013-1-10.
[12]	WU WEI, FENG FENG, ZHAO YUE, ,et al.. A low-fluorine solution with a 2:1 F/Ba mole ratio for the fabrication of YBCO films. Superconductor Science and Technology, 2014, 27(5): 055006-1-10.
[13]	TANG XIAO, SUO HONGLI, YE SHUAI,et al.Rapid synthesis of YBCO thick superconducting films by low fluorine TFA-MOD method.Journal of Inorganic Materials, 2010, 25(9): 971-974.
[14]	LLORDÉS A, ZALAMOVA K, RICART S,et al.Evolution of metal-trifluoroacetate precursors in the thermal decomposition toward high-performance YBa2Cu3O7 superconducting films.Chemistry of Materials, 2010, 22(5): 1686-1694.
[15]	MA A T H A X L, K YAMAGIWA B, HIRABAYASHI B I,et al.Microstructure characterization of YBa2Cu3O7-y thin film derived from the metal (Y, Ba, and Cu) naphthenates gels coated on the SrTiO3(100) substrate.Physica C: Superconductivity, 1998, 306(3/4): 245-252.
[16]	MATSUI H, TSUKADA K, TSUCHIYA T,et al.Reduced crystallization time of YBCO in a fluorine-free MOD process using UV-lamp irradiation.Physica C: Superconductivity and its Applications, 2011, 471(21/22): 960-962.
[17]	TANG XIAO, ZHAO YUE, WU WEI,et al.High-Jc YBa2Cu3O7-x-Ag superconducting thin films synthesized through a fluorine-free MOD method.Journal of the European Ceramic Society, 2015, 35(6): 1761-1769.
[18]	ZHAO YUE, P TORRES, TANG XIAO, ,et al.. Growth of highly epitaxial YBa2Cu3O(7-δ) films from a simple propionate-based solution. Inorganic Chemistry, 2015, 54(21): 10232-1-8.
[19]	XU YONGLI.High Jc Epitaxial YBa2Cu3O7-δ Films through a Non-fluorine Approach for Coated Conductor Applications. Cincinnati: University of Cincinnati,Doctor dissertation, 2003.
[20]	VERMEIR P, CARDINAEL I, SCHAUBROECK J,et al.Elucidation of the mechanism in fluorine-free prepared YBa2Cu3O(7-δ) coatings.Inorganic Chemistry, 2010, 49: 4471-4477.
[21]	EATOUGH M O, GINLEY D S, MOROSIN B,et al.Orthorhombic- tetragonal phase transition in high-temperature superconductor YBa2Cu3O7.Applied Physics Letters, 1987, 51(5): 367-368.
[22]	ZHAO YUE, TANG XIAO, WU WEI, ,et al.. Influence of substrate- film reactions on YBCO grown by fluorine-free MOD route. IEEE Transactions on Applied Superconductivity, 2017, 27(4): 6600304- 1-4.

无氟MOD法制备YBCO超导薄膜工艺中物相的演变过程

Intermediate Phase Evolution in YBCO Superconducting Film Fabricated by Fluorine Free MOD Method

RichHTML

PDF (PC)

可视化

摘要/Abstract

引用本文

使用本文

图/表 6

参考文献 22

相关文章 15

编辑推荐

Metrics

本文评价

[1]	陈明月, 颜志超, 陈静, 李敏娟, 刘志勇, 蔡传兵. YBa₂Cu₃O_7-_δ薄膜的BaCl₂/BaF₂-MOD法制备及超导特性研究[J]. 无机材料学报, 2023, 38(2): 199-204.
[2]	罗世淋, 张胜泰, 许保亮, 王凌坤, 段思逸菡, 丁艺, 赵倩, 段涛. YIG陶瓷对三价锕系模拟核素的固化行为研究[J]. 无机材料学报, 2022, 37(7): 757-763.
[3]	罗志永, 廖楚剑, 蔡传兵, 刘志勇, 李敏娟, 鲁玉明. 氩离子刻蚀对TFA-MOD法YBa₂Cu₃O_7-_x薄膜性能的影响研究[J]. 无机材料学报, 2019, 34(12): 1279-1284.
[4]	王雅, 索红莉, 毛磊, 刘敏, 马麟, 王毅, KAUSARShaheen, 周宇琦. Nb掺杂YBCO薄膜钉扎机理的研究[J]. 无机材料学报, 2019, 34(10): 1055-1059.
[5]	唐天威, 邱傅杰, 吴董杰, 徐克西. 分层式前驱坯体对YBCO单畴块材生长和磁通性能的影响[J]. 无机材料学报, 2015, 30(9): 963-970.
[6]	刘鑫, 熊杰, 张飞, 赵晓辉, 赵睿鹏, 陶伯万. Ba源配比对MOCVD法制备YBCO薄膜性能的影响研究[J]. 无机材料学报, 2014, 29(3): 275-278.
[7]	芮润生, 刘志勇, 白传易, 郭艳群, 金晓艳, 蔡传兵. 金属有机溶液法制备YBa₂Cu₃O_7-δ超导薄膜的厚化特性[J]. 无机材料学报, 2014, 29(11): 1167-1172.
[8]	毛磊, 索红莉, 刘敏, 张子立, 叶帅, 马麟. Nb⁵⁺掺杂对低氟MOD法制备的YBCO薄膜性能的影响[J]. 无机材料学报, 2013, 28(9): 956-960.
[9]	徐亚新, 熊杰, 夏钰东, 张飞, 薛炎, 陶伯万. 温度控制织构金属基带上YBCO外延薄膜生长及缺陷研究[J]. 无机材料学报, 2013, 28(5): 491-496.
[10]	蔡增辉, 刘志勇, 鲁玉明, 蔡传兵. 低成本电化学法制备RE₂Zr₂O₇缓冲层[J]. 无机材料学报, 2012, 27(11): 1191-1196.
[11]	叶帅, 索红莉, 吴紫平, 刘敏, 徐燕, 马麟. 提高YBCO薄膜高场性能的研究[J]. 无机材料学报, 2011, 26(7): 765-768.
[12]	汤潇, 索红莉, 叶帅, 刘敏, 吴紫平, 周美玲. 低氟TFA-MOD工艺快速制备YBCO超导厚膜的研究[J]. 无机材料学报, 2010, 25(9): 971-974.
[13]	吴紫平, 索红莉, 刘敏, 叶帅, 汤潇. 高性能Y_0.5Gd_0.5BCO薄膜的研究[J]. 无机材料学报, 2010, 25(12): 1273-1276.
[14]	叶帅,索红莉,刘敏,汤潇,吴紫平,周美玲. 低氟MOD法制备Zr掺杂YBCO薄膜的研究[J]. 无机材料学报, 2009, 24(6): 1205-1208.
[15]	张黄莉,赵高扬,彭海军. 溶胶—凝胶法制备YBCO超导薄膜微细图形[J]. 无机材料学报, 2009, 24(1): 192-194.