Ba源配比对MOCVD法制备YBCO薄膜性能的影响研究

doi:10.3724/SP.J.1077.2014.13277

无机材料学报 ›› 2014, Vol. 29 ›› Issue (3): 275-278.DOI: 10.3724/SP.J.1077.2014.13277 CSTR: 32189.14.SP.J.1077.2014.13277

Ba源配比对MOCVD法制备YBCO薄膜性能的影响研究

刘鑫, 熊杰, 张飞, 赵晓辉, 赵睿鹏, 陶伯万

(电子科技大学电子薄膜与集成器件国家重点实验室, 成都 610054)

收稿日期:2013-05-20 修回日期:2013-07-10 出版日期:2014-03-20 网络出版日期:2014-02-18
作者简介:刘鑫(1984–), 男, 硕士研究生. E-mail: liuxin_hope@163.com
基金资助:
中央高校业务经费(ZYGX2011Z002, ZYGX2012J039);四川省青年科技创新研究团队(2011JTD0006, 2011JTD0002);国家自然科学基金(51002024) Fundamental Research Funds for the Central Universities (ZYGX2011Z002, ZYGX2012J039);Youth Science and Technology Innovation Research Team of Sichuan (2011JTD0006, 2011JTD0002);National Natural Science Foundation of China(51002024)

Effects of Ba Ratio on Properties of YBCO Film Prepared by MOCVD

LIU Xin, XIONG Jie, ZHANG Fei, ZHAO Xiao-Hui, ZHAO Rui-Peng, TAO Bo-Wan

(State Key Lab of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China)

Received:2013-05-20 Revised:2013-07-10 Published:2014-03-20 Online:2014-02-18
About author:LIU Xin. E-mail: liuxin_hope@163.com

摘要/Abstract

摘要：

采用单一液相混合源进液及闪蒸的MOCVD系统在LaAlO₃(001)单晶基片上制备YBa₂Cu₃O_7-_x(YBCO)薄膜, 研究混合源中Ba含量对YBCO超导薄膜成分、结构及电流承载能力的影响。结果表明, 当Ba含量较小时, YBCO薄膜中易于形成尺寸较小的CuO颗粒; 随着Ba含量的增加, 薄膜中形成Ba₂CuO₃晶粒, 并且Ba₂CuO₃晶粒尺寸随Ba含量的增加而逐渐增大。杂质相的含量、尺寸以及与YBCO的晶格匹配程度对YBCO薄膜的双轴取向生长和电流承载能力具有重要影响。当原料摩尔配比Ba/Y=3.9时, 成功制备出了具有优异面内面外取向、结构致密的YBCO超导薄膜, 77 K下的300 nm厚度薄膜的临界电流密度达到4.0 MA/cm², 该研究结果对于第二代涂层导体的发展具有重要意义。

关键词: MOCVD, YBCO, 高温超导, 临界电流密度

Abstract:

YBa₂Cu₃O_7-_x(YBCO) films were deposited on single crystal LaAlO₃(001) substrates by MOCVD with the single source system and flash evaporation mode. The effects of Barium content on the composition, microstructure and current carrying capacity of YBCO superconducting films were systematically investigated. The results demonstrated that CuO grains were inclined to form in YBCO films with lower Ba content. As Ba content increasing, Ba₂CuO₃grains began to form and the size of the grain kept increased. The amount and size of the second phase and its lattice match with YBCO played important roles in biaxial epitaxial growth and current carrying capability of YBCO films. When the mole ratio of Ba/Y is 3.9 in precursor, the 300 nm-thickness YBCO superconducting film with good in-plane and out-of-plane texture have been successfully fabricated, showing the critical current density (J_c at self-field, 77 K) of 4.0 MA/cm² measured by induction method.

Key words: MOCVD, YBCO, high temperature superconducting, critical current density

中图分类号:

TQ26

刘鑫, 熊杰, 张飞, 赵晓辉, 赵睿鹏, 陶伯万. Ba源配比对MOCVD法制备YBCO薄膜性能的影响研究[J]. 无机材料学报, 2014, 29(3): 275-278.

LIU Xin, XIONG Jie, ZHANG Fei, ZHAO Xiao-Hui, ZHAO Rui-Peng, TAO Bo-Wan. Effects of Ba Ratio on Properties of YBCO Film Prepared by MOCVD[J]. Journal of Inorganic Materials, 2014, 29(3): 275-278.

图/表 5

图1 不同Ba/Y源配比的YBCO薄膜XRD图谱

Fig. 1 XRD patterns of YBCO films with different Ba/Y ratios

图2 YBCO(005)摇摆曲线的半高宽随Ba含量的变化趋势, 插图为Ba/Y=3.9时YBCO(005) 峰的摇摆曲线

Fig. 2 The dependence of FWHM values of YBCO(005) rocking curve on Ba content. The inset is YBCO(005) rocking curve at Ba/Y=3.9

图3 YBCO(103)Φ扫描半高宽随Ba含量的变化趋势, 插图为Ba/Y=3.9时YBCO薄膜的Φ扫描曲线

Fig. 3 The dependence of FWHM values of YBCO(103) φ-scans on Ba content. The inset is φ-scan curve of YBCO film grown at Ba/Y=3.9

图4 不同Ba/Y的YBCO薄膜SEM照片

Fig. 4 SEM images of YBCO films with different Ba/Y (a) Ba/Y=3.3; (b) Ba/Y=3.6; (c) Ba/Y=3.9; (d) Ba/Y=4.2

图5 临界电流密度(Jc)与YBCO薄膜中Ba/Y配比的关系图

Fig. 5 The relationship between critical current density (Jc) and Ba/Y ratio of YBCO film

参考文献 12

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Ba源配比对MOCVD法制备YBCO薄膜性能的影响研究

Effects of Ba Ratio on Properties of YBCO Film Prepared by MOCVD

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