紫外光辐照下钛硅共掺杂类金刚石薄膜微结构的演化

doi:10.15541/jim20130635

摘要/Abstract

摘要：

采用中频磁控溅射Ti80Si20合金靶在单晶硅表面制备了钛硅共掺杂的类金刚石薄膜。利用紫外-可见光多波长Raman光谱表征薄膜微结构, 并结合FTIR光谱研究了紫外光辐照对类金刚石薄膜微结构的影响, 进一步讨论了紫外光辐照下薄膜微结构的演化机理。结果表明: 非晶结构的类金刚石薄膜出现反式聚乙炔和聚对苯乙炔类聚合物结构以及sp杂化的线型卡宾碳结构。紫外光辐照诱导薄膜微结构驰豫和重构, 薄膜Si-O和C-O键含量增加, C=C和C-H键含量减少; 同时薄膜sp²团簇尺寸减小而无序度增大。

关键词: 类金刚石薄膜, 紫外光辐照, 拉曼光谱, 红外光谱, 结构演化

Abstract:

Titanium/silicon co-doped diamond-like carbon films were deposited on Si substrate by middle frequency magnetron sputtering using Ti80Si20 composite as target. The microstructure of the deposited films was characterized by ultraviolet and visible multi-wavelength Raman spectroscope. The influence of ultraviolet light irradiation on microstructure of the films was investigated by a combination of Raman and FTIR spectroscope. The mechanism of microstructural evolution of the films induced by ultraviolet light irradiation was discussed. The results show that the film dominated by amorphous structure displays inclusions of trans-polyacetylene, p-phenylene vinylene and sp hybridized carbine carbon chains. Ultraviolet light irradiation induces the relaxation and reconstruction of microstructure in the films, which leads to the increase of Si-O and C-O bonding, and the decrease of C=C and C-H bonding. Meanwhile, the size of sp² clusters in the films decreases and the degree of disorder of sp² clusters increases.

Key words: diamond-like carbon film, ultraviolet light irradiation, Raman spectra, FTIR spectra, microstructural evolution

中图分类号:

TB303
O484

姜金龙, 王琼, 黄浩, 张霞, 王玉宝, 耿庆芬. 紫外光辐照下钛硅共掺杂类金刚石薄膜微结构的演化[J]. 无机材料学报, 2014, 29(9): 941-946.

JIANG Jin-Long, WANG Qiong, HUANG Hao, ZHANG Xia, WANG Yu-Bao, GENG Qing-Fen. Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films[J]. Journal of Inorganic Materials, 2014, 29(9): 941-946.

图/表 7

图1 不同激发波长下薄膜的Raman光谱

Fig. 1 Raman spectra of the film at different excitation wavelengths

图2 薄膜的HRTEM照片

Fig. 2 HRTEM image of the film

图3 薄膜Raman光谱拟合峰的位置随激光波长的变化

Fig. 3 Fitting Raman peak position of the film as a function of excitation wavelength (a) G peak; (b) T2, D and P peaks

图4 薄膜在低波数区间的Raman光谱

Fig. 4 Raman spectrum of the film in the low wavenumber range

图5 紫外光辐照(a) 6 h和(b) 12 h后薄膜Raman光谱

Fig. 5 Raman spectra of the film after ultraviolet light irradiation for (a) 6 h and (b) 12 h

表1 紫外光辐照前后薄膜Raman光谱拟合结果

Table 1 Fitting results of Raman spectra of the film before and after ultraviolet light irradiation

Radiation time/h	G /cm^-1	T₁ /cm^-1	T₂ /cm^-1	P /cm^-1	I(D)/I(G)	FWHM(G)/cm^-1	Disp(G)/(cm^-1•nm^-1)
0	1561.4	1045.9	1472.0	1184.7	0.84	137.5	0.59
6	1555.3	1056.5	1474.8	1187.7	0.88	151.7	0.72
12	1555.0	1059.3	1474.0	1193.7	0.77	153.0	0.72

图6 薄膜FTIR光谱(a)和2700~3400 cm-1区间放大的光谱(b)

Fig. 6 FTIR spectra (a) and magnified high wavenumber region from 2700 to 3400 cm-1 in the FTIR spectra (b) of the film

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