紫外光辐照下钛硅共掺杂类金刚石薄膜微结构的演化
姜金龙, 王 琼, 黄 浩, 张 霞, 王玉宝, 耿庆芬
Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films
JIANG Jin-Long, WANG Qiong, HUANG Hao, ZHANG Xia, WANG Yu-Bao, GENG Qing-Fen
无机材料学报
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2014, (9): 941
-946
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DOI: 10.15541/jim20130635
