无机材料学报

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升华再结晶法制备AIN晶须及其生长特性

周和平; 陈浩; 刘耀诚; 吴音   

  1. 清华大学材料科学与工程系新型陶瓷与精细工艺国家重点实验室; 北京100084
  • 收稿日期:1997-08-25 修回日期:1997-09-15 出版日期:1998-08-10 网络出版日期:1998-08-10

Fabricaion Process and Growth Characteristics of AIN Whiskers by Sublimation-Recrystallization Method

ZHOU He-Ping; CHEN Hao; LIU Yao-Cheng; WU Yin   

  1. State Key Laboratory of New Ceramics and Fine Processing; Department of Materials Science and Engineering; Tsinghua University Beliing 100084 China
  • Received:1997-08-25 Revised:1997-09-15 Published:1998-08-10 Online:1998-08-10

摘要: 以AIN粉体为原料,加入适量的CaO-B2O3矿化剂,采用升华再结晶法制备AIN晶须.初步探讨了反应器及其合成温度对产物种类的影响,研究了晶须的结构特征及其生长机理.结果表明,初期的合成产物包括AIN晶柱、晶须和非晶AIN纤维,以VLS机制生长:后期产物为AIN晶须,表现为VS生长机制:XRD及TEM分析表明,晶须大多呈现沿{2110}、{101l}和{0001},l=0、1、2、3的晶面生长.多数晶须宏观生长轴向平行于这些晶面的法线,而部分晶须由于发生斜生长,导致宏观生长轴向与这些晶面的法线斜交.

关键词: 氮化铝晶须, 升华再结晶法, 取向

Abstract: Using AlN powders as raw materials and CaO-B2O3 as additives, AlN whiskers were fabricated by a sublimation-recrystallization
method. The influences of reaction chamber’s structure and temperature gradient on AlN synthetics were inspected, as well as the fabrication mechanism
and growth characteristics of AlN whiskers. At the earlier stage of reaction, different morphologies of AlN synthetics such as crystal pillars,
whiskers and noncrystalline fibers were produced by VLS mechanism. While at the later stage, VS mechanism occurred, which yielded only AlN
whiskers. By XRD and TEM analysis, it was discovered that most AlN whiskers grew on crystal planes {2110}, {101l} and {0001}, along crystal axes [2110], [101w]
and [0001], l=0, 1, 2 and 3, w=0, 1, 2 and 3. But in some whiskers, oblique growth was observed, therefore nonnormality of macroscopic growth
direction to growth crystal plane existed.

Key words: aluminium nitride whisker, sublimation-recrystallization method, orientation

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