无机材料学报

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Sol-Gel法制备B2O3-P2O5-SiO2系低介玻璃陶瓷

李勃; 周济; 岳振星; 马振伟; 桂治轮; 李龙土   

  1. 清华大学材料系新型陶瓷与精细工艺国家重点实验室, 北京 100084
  • 收稿日期:1999-12-13 修回日期:2000-01-28 出版日期:2000-12-20 网络出版日期:2000-12-20

Preparation of B2O3-P2O5-SiO2 Glass-Ceramics by the Sol-Gel Method

LI Bo; ZHOU Ji; YUE Zhen-Xing; MA Zhen-Wei; GUI Zhi-Lun; LI Long-Tu   

  1. State Key Lab of New Ceramics and Fine Processing; Dept. of Materials Science and Engineering; Tsinghua University; Beijing 100084; China
  • Received:1999-12-13 Revised:2000-01-28 Published:2000-12-20 Online:2000-12-20

摘要: 采用溶胶-凝胶法,以正硅酸乙酯和硼酸、磷酸为原料,制备出一种BPS超细粉.使用这种超细粉,可在低于950℃空气气氛中烧结,获得性能优良的低分电常数、低损耗玻璃陶瓷.该种材料的介电常数ε≤5、介电损耗tanδ<3×10-3(1MHz),有望用于超高频叠层片式电感领域.

关键词: 溶胶-凝胶法, 玻璃陶瓷, 低介电常数, 片式电感

Abstract: A sol-gel process was used to synthesize borophosphosilicate ultrafine powders by using boric acid, phosphoric acid and TEOS as starting precursors. The powder can be sintered at 900℃ in air. The dielectric properties of the sintered glass-ceramics were measured. The results show that the sintered glass-ceramics possess dielectric constants less than 5 and dielectric loss less than 3×10-3 at the frequency of 1MHz. The glass-ceramics are potential for using as dielectric materials in a super high frequency multi-layer chip inductor field.

Key words: sol-gel method, ultrafine powder, glass-ceramics, low dielectric, multi-layer chip induc

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