先进光源装置用碳化硅反射镜性能研究

doi:10.15541/jim20250354

无机材料学报 ›› 2026, Vol. 41 ›› Issue (6): 805-813.DOI: 10.15541/jim20250354 CSTR: 32189.14.jim20250354

先进光源装置用碳化硅反射镜性能研究

刘雷敏¹(), 罗红心², 何玉梅², 金利民², 李永杰¹, 刘静雯², 魏玉全¹, 孙安乐¹, 陈忠明¹, 刘学建¹, 殷杰¹(), 黄政仁¹^,²()

¹ 中国科学院上海硅酸盐研究所, 上海 200050
² 中国科学院上海高等研究院, 上海 201210

收稿日期:2025-09-08 出版日期:2026-06-20 网络出版日期:2025-11-12
通讯作者: 殷杰, 研究员. E-mail: jieyin@mail.sic.ac.cn;
黄政仁, 研究员. E-mail: zhrhuang@mail.sic.ac.cn
作者简介:刘雷敏(1987-), 男, 高级工程师. E-mail: leiminliu@mail.sic.ac.cn
第一联系人：
*本文投稿正逢黄政仁研究员60岁生日之际, 衷心祝愿黄老师身体健康, 学术长青！
基金资助:
国家自然科学基金(U23A20563);国家自然科学基金(52172077);国家重点研发计划(2024YFB3714704)

Performance of Silicon Carbide Mirrors for Advanced Light Source Devices

LIU Leimin¹(), LUO Hongxin², HE Yumei², JIN Limin², LI Yongjie¹, LIU Jingwen², WEI Yuquan¹, SUN Anle¹, CHEN Zhongming¹, LIU Xuejian¹, YIN Jie¹(), HUANG Zhengren¹^,²()

¹ Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
² Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China

Received:2025-09-08 Published:2026-06-20 Online:2025-11-12
Contact: YIN Jie, professor. E-mail: jieyin@mail.sic.ac.cn;
HUANG Zhengren, professor. E-mail: zhrhuang@mail.sic.ac.cn
About author:LIU Leimin (1987-), male, senior engineer. E-mail: leiminliu@mail.sic.ac.cn
Supported by:
National Natural Science Foundation of China(U23A20563);National Natural Science Foundation of China(52172077);National Key R&D Program of China(2024YFB3714704)

摘要/Abstract

摘要：

随着同步辐射、X射线自由电子激光等先进光源技术的快速发展, 高能、高亮度X射线装置面临的挑战日益突出。高能光束照射到反射镜表面时, 高能量吸收会导致反射镜出现辐射损伤和热变形等现象, 这已成为限制光束线性能提升的关键因素之一。本研究从反射镜的结构设计、材料优选、性能模拟、样件制备、光学加工及性能检测等方面进行了深入探讨, 采用固相烧结结合精密光学加工技术, 研制了具备优异光学性能的碳化硅平面反射镜, 分析了不同材料对反射镜面热变形的影响, 以及反射镜面形精度和光洁度控制对光学表面质量的影响。研究表明: 在吸收功率为200 W工况下, 改性碳化硅反射镜与通用单晶硅反射镜相比, 镜面子午方向上的法向变形降低约25%; 经光学加工后, 其镜面峰谷值(PV)为24.294 nm、均方根值(RMS)为1.680 nm, 表面粗糙度RMS为0.168 nm, 释气率为2.40×10⁻⁷ Pa∙L/(s∙cm²)。这些性能满足先进光源装置对超光滑反射镜的使用要求, 有望推动高性能碳化硅陶瓷成为继单晶硅之后新一代先进光源装置反射镜的理想材料。

关键词: 同步辐射, X射线自由电子激光, 碳化硅反射镜, 面形精度, 粗糙度

Abstract:

The rapid development of advanced light source technologies, such as synchrotron radiation and X-ray free electron lasers, especially for high-energy and high-brightness X-ray facilities, has become one of the key factors restricting the further improvement of beamline performance. When high-energy beams are irradiated onto the surface of mirrors, the absorption of such energy can cause radiation damage and thermal deformation of the mirrors. This study provides an in-depth exploration of various aspects, including the structural design of mirrors, material selection, performance simulation, prototype fabrication, optical processing, and performance testing. By combining solid-state sintering with precision optical processing technology, a silicon carbide (SiC) planar mirror with high optical properties was developed. The influence of different materials on the thermal deformation of the reflective mirror surface, as well as the impact of surface shape accuracy and roughness control on the optical surface quality of the reflective mirror, was discussed. The research shows that under an absorbed power of 200 W, the modified SiC mirror exhibits approximately 25% reduction in normal deformation along the meridional direction compared to conventional single-crystal silicon mirrors. After optical processing, the peak to valley (PV) value of its mirror surface reaches 24.294 nm, the root mean square (RMS) value reaches 1.680 nm, the surface roughness RMS reaches 0.168 nm, and the gas release rate is 2.40×10⁻⁷ Pa∙L/(s∙cm²). These results meet the requirements for ultra-smooth mirrors in advanced light source facilities, demonstrating the potential of high-performance silicon carbide ceramics as an ideal choice for next-generation mirror applications, instead of single-crystal silicon.

Key words: synchrotron radiation, X-ray free electron laser, silicon carbide mirror, surface shape accuracy, roughness

中图分类号:

TH743

刘雷敏, 罗红心, 何玉梅, 金利民, 李永杰, 刘静雯, 魏玉全, 孙安乐, 陈忠明, 刘学建, 殷杰, 黄政仁. 先进光源装置用碳化硅反射镜性能研究[J]. 无机材料学报, 2026, 41(6): 805-813.

LIU Leimin, LUO Hongxin, HE Yumei, JIN Limin, LI Yongjie, LIU Jingwen, WEI Yuquan, SUN Anle, CHEN Zhongming, LIU Xuejian, YIN Jie, HUANG Zhengren. Performance of Silicon Carbide Mirrors for Advanced Light Source Devices[J]. Journal of Inorganic Materials, 2026, 41(6): 805-813.

图/表 16

图1 碳化硅反射镜制备工艺流程

Fig. 1 Preparation process of silicon carbide mirror

图2 反射镜冷却系统模型图

Fig. 2 Model diagram of mirror cooling system

表1 材料的物理参数

Table 1 Physical parameters of materials

Physical parameter	SiC	Si	Cu
Elastic modulus/GPa	440	112	115
Poisson’s ratio	0.18	0.28	0.32
Bulk density/(g·cm^-3)	3.12	2.33	8.94
Thermal conductivity/(W·m^-1·K^-1)	180	100	320
Coefficient of thermal expansion/(×10^-6, K^-1)	2.20	4.00	16.5

图3 反射镜吸收的热功率密度分布

Fig. 3 Distribution of heat power absorbed on the mirror surface (a) 200 W; (b) 50 W. Colorful figures are available on website

图4 两种材质反射镜的热-结构数值模拟结果

Fig. 4 Thermal-structure numerical simulation results of two types of material mirrors Temperature distribution: (a) Si-200 W, (b) SiC-200 W, (c) Si-50 W, (d) SiC-50 W; Thermal deformation distribution: (e) Si-200 W, (f) SiC-200 W, (g) Si-50 W, (h) SiC-50 W. Colorful figures are available on website

图5 热载荷冲击下反射镜子午方向面形

Fig. 5 Meridian surface shape of mirror under thermal load impact (a) Normal deformation curves of center line of the spot region; (b) Slope curves

表2 反射镜热-结构仿真分析结果

Table 2 Thermal-structure simulation and analysis results of mirror

Thermal power/W	Material	Maximum temperature/ ℃	Meridian slope/ μrad	Residual meridian slope after deducting the fitted circle/μrad	Fitting the radius of the circle/ km
200	Si	47.1	7.3	4.8	8.7
200	SiC	45.5	5.5	2.8	18.2
50	Si	34.3	1.8	1.2	34.7
50	SiC	33.9	1.4	0.7	72.6

图6 碳化硅反射镜镜坯

Fig. 6 Silicon carbide mirror blank

图7 碳化硅陶瓷的断口形貌

Fig. 7 Fracture morphology of silicon carbide ceramics

表3 碳化硅陶瓷的物理性能

Table 3 Physical properties of silicon carbide ceramics

Physical property	Result
Bulk density/(g·cm^-3)	3.12±0.01
Flexural strength/MPa	491±56
Elastic modulus/GPa	439±3
Thermal conductivity/(W·m^-1·K^-1)	180.0±7.5
Coefficient of thermal expansion/(×10^-6, K^-1)	2.22±0.02

图8 碳化硅反射镜表面粗糙度

Fig. 8 Surface roughness of silicon carbide mirror (a) Polished SiC; (b) Polished Si film. Colorful figures are available on website

图9 碳化硅反射镜光学加工与面形检测

Fig. 9 Optical processing and surface shape detection of silicon carbide mirror (a) Ion beam fine polishing; (b) Surface shape detection; (c) Convergence process of silicon carbide mirror shape error. Colorful figures are available on website

图10 碳化硅反射镜最终面形

Fig. 10 Final surface shape of silicon carbide mirror (a) Meridian direction; (b) Arc vector direction. Colorful figures are available on website

表4 本研究与国际研制反射镜的光学面形对比

Table 4 Comparison of optical surface shape of this study with internationally developed mirrors

Country	Year	Device	Material	Size/(mm×mm×mm)	Surface shape accuracy	Roughness/nm
France^[26]	2018	ESRF BM08/LISA	Si	900×35	Slope error: 0.5 μrad RMS	0.2
Germany^[27]	2014	PETRA III	Si	100×50×15	Height error: <0.1 nm Slope error: 0.041 μrad RMS	0.2
Japan^[28]	2025	SPring-8	Si	400×50×50	Height error: 1 nm	0.15
China^[29]	2020	HEPS/SSRF	Si	200×50×50	Slope error: 0.26 μrad RMS	0.3
China	2025	This work	SiC	440×50×50	Height error: 1.3 nm Slope error: 0.166 μrad RMS	0.13

图11 碳化硅反射镜释气压力检测

Fig. 11 Detection results of outgassing rate of SiC mirror (a) Outgassing spectrum; (b) Extractor gauges. Colorful figures are available on website

表S1 反射镜材料的关键性能比较[4]

Table S1 Comparison of the key performance stability of mirror materials[4]

Material	Elastic modulus/ GPa	Density/ (g·cm^-3)	Thermal conductivity/ (W·m^-1·K^-1)	Coefficient of thermal expansion/ (×10^-6, K^-1)	Ratio stiffness/ (MPa·m³·kg^-1)	Thermal stability/ (×10⁶, W·m^-1)	Maximum weight loss rate^***/%
Diamond	880	3.50	2000	1.50	251	1333	0
SSiC^*	440	3.12	180	2.20	138	81	90
RB-SiC^**	360	3.03	130	2.50	119	52	90
ULE	67	2.20	1.30	0.03	30	43	75
Si	112	2.33	100	4.00	48	25	-
Be	303	1.84	216	11.50	165	19	60

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先进光源装置用碳化硅反射镜性能研究

Performance of Silicon Carbide Mirrors for Advanced Light Source Devices

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