湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究

doi:10.3724/SP.J.1077.2013.12306

无机材料学报 ›› 2013, Vol. 28 ›› Issue (4): 420-424.DOI: 10.3724/SP.J.1077.2013.12306 CSTR: 32189.14.SP.J.1077.2013.12306

湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究

王韬, 屈新萍

(复旦大学专用集成电路与系统国家重点实验室, 微电子学系, 上海 200433)

收稿日期:2012-05-10 修回日期:2012-08-09 出版日期:2013-04-10 网络出版日期:2013-03-20
作者简介:王韬(1986–), 男, 硕士研究生. E-mail: 09210720069@fudan.edu.cn; wt05dk2@126.com
基金资助:
新世纪优秀人才支持计划(NCET-11-0111) Project of New Century Excellent Talents in University (NCET-11-0111)

Research on ZnO Nanorods Grown on Si Substrate Etched by TMAH as Si Solar Cell Antireflection Layer

WANG Tao, QU Xin-Ping

(State key lab of ASIC and system, Department of Microelectronics, Fudan University, Shanghai 200433, China)

Received:2012-05-10 Revised:2012-08-09 Published:2013-04-10 Online:2013-03-20
About author:WANG Tao. E-mail: 09210720069@fudan.edu.cn; wt05dk2@126.com

摘要/Abstract

摘要：

在硅基太阳能电池表面制备减反层可以有效降低硅表面的反射率, 提高吸收率, 从而提高硅基太阳能电池的光电转换效率。本研究利用四甲基氢氧化铵(Tetramethyl Ammonium Hydroxide TMAH)溶液对(100)单晶硅进行各向异性腐蚀, 在表面腐蚀出金字塔结构, 得到了最低为6%左右的反射率。然后采用水热法在该衬底生长氧化锌纳米棒, 得到了最低小于3%的反射率, 比单采用腐蚀或者ZnO纳米棒生长的硅表面的反射率更低。这种减反方法工艺简单、高效, 有望得到应用。

关键词: 减反层, 四甲基氢氧化铵, 湿法腐蚀, 各向异性, ZnO纳米棒

Abstract:

An antireflection layer grown on the Si surface of a solar cell can reduce reflection and increase absorption of light. As a result, it can increase the conversion efficiency of the Si solar cell. In this work, (100) Si wafers were anisotropically wet etched by tetramethyl ammonium hydroxide (TMAH) solution and the pyramidal structures were obtained. The minimum reflectivity of etched Si was lower than 6%. Then ZnO nanorods were grown on the Si substrate by a hydrothermal method. The minimum reflectivity of this structure was lower than 3%, better than that from the TMAH etched surface or ZnO nanorods covered surface only. This method has great potential because of its simplicity and high efficiency.

Key words: antireflection layer, tetramethyl ammonium hydroxide, wet etching, anisotropic, ZnO nanorods

中图分类号:

TK514

王韬, 屈新萍. 湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究[J]. 无机材料学报, 2013, 28(4): 420-424.

WANG Tao, QU Xin-Ping. Research on ZnO Nanorods Grown on Si Substrate Etched by TMAH as Si Solar Cell Antireflection Layer[J]. Journal of Inorganic Materials, 2013, 28(4): 420-424.

图/表 5

图1 经过不同时间TMAH腐蚀后的硅表面反射率

Fig. 1 Reflectance of the Si surface after etching in the TMAH solution for different etching time

图2 TMAH腐蚀不同时间后的硅表面与截面SEM照片

Fig. 2 Surface and cross-sectional morphologies of Si after etching in the TMAH solution for different time

图3 在硅片上利用0.04 mol/L六水合硝酸锌和六次甲基四胺生长液经过不同时间生长ZnO纳米棒后的表面反射率

Fig. 3 Reflectivity of Si wafer after growing ZnO nanorods on the surface with different time using 0.04 mol/L Zinc nitrate hexhydrate and hexamethylene tetramine

图4 TMAH腐蚀结合ZnO纳米棒生长后的硅表面反射率

Fig. 4 The reflectivity of the Si surface after etching in the TMAH for different times and growing the ZnO nanorods

图5 在不同表面处理的Si片生长ZnO纳米棒的表面和断面SEM照片

Fig. 5 The surface morphology and cross-sectional SEM images of the Si substrates after different surface treatments

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湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究

Research on ZnO Nanorods Grown on Si Substrate Etched by TMAH as Si Solar Cell Antireflection Layer

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