超声喷雾热解法生长氧化锌同质p-n结及其电致发光性能研究

doi:10.3724/SP.J.1077.2007.00173

无机材料学报

超声喷雾热解法生长氧化锌同质p-n结及其电致发光性能研究

边继明, 刘维峰, 胡礼中, 梁红伟

大连理工大学三束材料改性国家重点实验室及物理与光电工程学院, 大连 116024

收稿日期:2006-01-16 修回日期:2006-07-19 出版日期:2007-01-20 网络出版日期:2007-01-20

Fabrication of ZnO p-n Homojunction by Ultrasonic Spray Pyrolysis and Its Electroluminescence Properties

BIAN Ji-Ming, LIU Wei-Feng, HU Li-Zhong, LIANG Hong-Wei

State Key Laboratory for Materials Modification by Laser, Ion, Electron Beams, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

Received:2006-01-16 Revised:2006-07-19 Published:2007-01-20 Online:2007-01-20

摘要/Abstract

摘要： 采用超声喷雾热解法在单晶GaAs(100) 衬底上生长ZnO同质p-n结. 以醋酸锌水溶液为前驱体, 分别以醋酸铵和硝酸铟为氮(N)源和铟(In)源, 通过氮--铟(N-In)共掺杂沉积p型ZnO薄膜, 以未故意掺杂的ZnO薄膜做为n型层获得ZnO基同质p-n结. 采用热蒸发工艺在ZnO层和GaAs衬底上分别蒸镀Zn/Au和Au/Ge/Ni电极而获得发光二极管原型器件, 在室温下发现了该器件正向电流注入下的连续发光现象.

关键词: ZnO薄膜, 同质p-n结, 电致发光, 超声喷雾热分解

Abstract: ZnO has recently become a very popular material due to its great potential for
optoelectronics applications. To realize practical application of short-wavelength optoelectronic devices (such as LEDs and LDs) based on ZnO materials, electroluminescence (EL) from ZnO p-n homojunction is pivotal. In this article, ZnO homojunction was grown on single-crystal GaAs (100) substrate by ultrasonic spray pyrolysis with Zn(CH₃COO)_2^﹒2H₂O as precursor solution. CH₃COONH₄ and In(NO₃)₃ aqueous solutions were chosen as the doping sources of nitrogen and indium respectively. The ZnO homojunction was comprised of N-In codoped p-type ZnO and unintentionally doped n-type ZnO film. Ohmic contact layers on n-type ZnO layer and GaAs substrate were formed by Zn/Au and Au/Ge/Ni electrode respectively. Moreover, light emission was observed under forward current injection at room temperature, the emission could be clearly seen by the naked eye in a darkened room. With the demonstrated success of electroluminescence from ZnO p-n homojunction at room temperature, the application of short-wavelength optoelectronic devices based on ZnO materials should be possible in the near future.

Key words: ZnO film, p-n homojunction, electroluminescence, ultrasonic spray pyrolysis

中图分类号:

TN957

边继明,刘维峰,胡礼中,梁红伟. 超声喷雾热解法生长氧化锌同质p-n结及其电致发光性能研究[J]. 无机材料学报, DOI: 10.3724/SP.J.1077.2007.00173.

BIAN Ji-Ming,LIU Wei-Feng,HU Li-Zhong,LIANG Hong-Wei. Fabrication of ZnO p-n Homojunction by Ultrasonic Spray Pyrolysis and Its Electroluminescence Properties[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2007.00173.

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超声喷雾热解法生长氧化锌同质p-n结及其电致发光性能研究

Fabrication of ZnO p-n Homojunction by Ultrasonic Spray Pyrolysis and Its Electroluminescence Properties

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