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无机材料学报

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TiO2/SiO2复合薄膜的晶化特征和结构转变研究

翟继卫; 张良莹; 姚熹   

  1. 西安交通大学电子材料研究所; 西安710049
  • 收稿日期:1997-05-05 修回日期:1997-06-16 出版日期:1998-06-20 网络出版日期:1998-06-20

Crystallization and Structural Transformation of TiO2/SiO2 Composite Thin Films

ZHAI Ji-Wei; ZHANG Liang-Ying; YAO Xi   

  1. Electronic Materials Research Laborotory; Xi an Jiaotong University Xi an 710049 China
  • Received:1997-05-05 Revised:1997-06-16 Published:1998-06-20 Online:1998-06-20

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摘要： 对TiO2／SiO2复合薄膜的晶化特征进行了分析，研究表明，随着TiO2含量的增加，其晶化温度降低，而由锐钛矿相完全转变为金红石相的速度减慢．SiO2的析晶温度也随着TiO2含量的增加而降低，即TiO2具有诱导SiO22析晶的作用．锐钛矿晶粒尺寸的增加幅度随着TiO2含量的降低和热处理温度的升高而增大．其晶粒尺寸的大小与热处理时间的平方根成正比．认为由于TiO2含量的不同，造成薄膜中由锐钛矿相完全转变成金红石相的速度差异主要来自于薄膜中应力的作用．

关键词: 溶胶-凝胶, 复合薄膜, 晶化, 相转变

Abstract: The crystallization behavior and structural transformation of Sol-Gel TiO2/SiO2 thin films varing with composition, temperature, time were studied. With the increase of TiO2 concentration,
the temperature of TiO2 crystallization and the rate of structural transformation from anatase to rutile were decreased. The temperature of SiO2 crystallization and the grain size of anatase
crystallites decreased and increased with the increase of TiO2 concentration respectively, and the later one increased with annealing temperature as will. The grain size of TiO2 crystallites was varied linearly
with the root square of annealing time. The difference of the rate of structural transformation from anatase to rutile depends on mainly the stress in the films.

Key words: Sol-Gel, composition film, crystallization, phase transformation

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