ZrO2-SiO2薄膜对离子交换增强玻璃的光学和力学性能影响

doi:10.3724/SP.J.1077.2013.13014

无机材料学报 ›› 2013, Vol. 28 ›› Issue (7): 785-779.DOI: 10.3724/SP.J.1077.2013.13014 CSTR: 32189.14.SP.J.1077.2013.13014

ZrO₂-SiO₂薄膜对离子交换增强玻璃的光学和力学性能影响

张鹤, 周珏辉, 张启龙, 杨辉

(浙江大学材料科学与工程学系, 杭州 310027)

收稿日期:2013-01-07 修回日期:2013-02-18 出版日期:2013-07-20 网络出版日期:2013-06-19
作者简介:张鹤. E-mail: crane507@qq.com
基金资助:
National Key Technology Support Program (2009BAG12A07); Zhejiang Province Innovation Group Program (2011R09010)

Mechanical and Optical Properties of Ion-exchange Strengthened Glass Coated with Sol-Gel Derived ZrO₂-SiO₂ Film

ZHANG He, ZHOU Jue-Hui, ZHANG Qi-Long, YANG Hui

(Department of Material Science and Engineering, Zhejiang University, Hangzhou 310027, China)

Received:2013-01-07 Revised:2013-02-18 Published:2013-07-20 Online:2013-06-19
About author:ZHANG He (1983–), candidate of PhD. E-mail: crane507@qq.com
Supported by:
National Key Technology Support Program (2009BAG12A07); Zhejiang Province Innovation Group Program (2011R09010)

摘要/Abstract

摘要： 采用溶胶-凝胶法在玻璃表面制备出ZrO₂-SiO₂薄膜, 然后通过离子交换形成镀膜增强玻璃, 研究了薄膜组成对离子交换增强玻璃的力学和光学性能的影响。利用紫外可见分光光度计、激光椭偏仪、纳米压痕、三点抗弯和能谱(EDX)分析了薄膜结构及性能。结果表明: 所有薄膜均连续均匀, 纯ZrO₂薄膜为四方相结构, 含Si薄膜为无定形结构; 薄膜具有较高弹性恢复率(>60%)以及H/E比(>0.1), 有利于强度增强; 随Si含量增加, 可见光透过率增大, 但表面硬度和杨氏模量随之降低; 0.5ZrO₂-0.5SiO₂薄膜综合性能最佳: 表面硬度为18 GPa, 抗弯强度为393 MPa, 厚度~45 nm时可见光透过率大于85%。

关键词: 离子交换玻璃, ZrO₂-SiO₂薄膜, 溶胶-凝胶, 纳米压痕

Abstract: ZrO₂-SiO₂ films of different SiO₂ content were deposited on soda-lime glass substrates through a Sol-Gel process, which was followed by an ion-exchange strengthening process. Phase presents, surface morphology and ion-exchange depth were determined by X-ray diffractometer, scanning electron microscope and energy dispersive spectrometer analysis, respectively. The mechanical and optical properties of coated glass were studied. Homogeneous, continuous and dense films are obtained. Pure ZrO₂ film belongs to tetragonal structure, while other films with SiO₂ have an amorphous structure. ZrO₂-SiO₂ films with high ratio (H/E≥0.1) and elastic recovery (We≥60%) were thought to be favourable bending strength. Light transmittance increased, while hardness and Young’s modulus decreased with the increasing SiO₂ content in films. Typically, chemical strengthened 0.5ZrO₂-0.5SiO₂ film coated glass exhibited high bending strength of 393 MPa and high hardness of 18 GPa, and a negligible optical loss in visible region for thin thickness (~45 nm).

Key words: ion-exchange glass, Sol-Gel, ZrO₂-SiO₂ film, nanoindentation

中图分类号:

TQ174

张鹤, 周珏辉, 张启龙, 杨辉. ZrO₂-SiO₂薄膜对离子交换增强玻璃的光学和力学性能影响[J]. 无机材料学报, 2013, 28(7): 785-779.

ZHANG He, ZHOU Jue-Hui, ZHANG Qi-Long, YANG Hui. Mechanical and Optical Properties of Ion-exchange Strengthened Glass Coated with Sol-Gel Derived ZrO₂-SiO₂ Film[J]. Journal of Inorganic Materials, 2013, 28(7): 785-779.

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ZrO₂-SiO₂薄膜对离子交换增强玻璃的光学和力学性能影响

Mechanical and Optical Properties of Ion-exchange Strengthened Glass Coated with Sol-Gel Derived ZrO₂-SiO₂ Film

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