激光诱导损伤对熔石英玻璃弯曲强度弱化影响及安全设计

doi:10.15541/jim20220610

无机材料学报 ›› 2023, Vol. 38 ›› Issue (6): 671-677.DOI: 10.15541/jim20220610 CSTR: 32189.14.10.15541/jim20220610

激光诱导损伤对熔石英玻璃弯曲强度弱化影响及安全设计

靳赛¹(), 刘小根²(), 齐爽², 赵润昌¹, 李志军¹

1.中国工程物理研究院激光聚变研究中心, 绵阳 621900
2.中国建筑材料科学研究总院有限公司绿色建筑材料国家重点实验室, 北京 100024

收稿日期:2022-10-17 修回日期:2022-11-18 出版日期:2022-12-27 网络出版日期:2022-12-27
通讯作者: 刘小根, 教授. E-mail: xtlxg@163.com
作者简介:靳赛(1990-), 男, 工程师. E-mail: saga_jinsai@163.com

Fused Silica Glass: Laser-induced Damage on Bending Strength Weakening and Safety Design

JIN Sai¹(), LIU Xiaogen²(), QI Shuang², ZHAO Runchang¹, LI Zhijun¹

1. Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
2. State Key Laboratory of Green Building Materials, China Building Materials Academy, Beijing 100024, China

Received:2022-10-17 Revised:2022-11-18 Published:2022-12-27 Online:2022-12-27
Contact: LIU Xiaogen, professor. E-mail: xtlxg@163.com
About author:JIN Sai (1990-), male, Engineer. E-mail: saga_jinsai@163.com
Supported by:
National Natural Science Foundation of China(52072356);National Natural Science Foundation of China(52032011)

摘要/Abstract

摘要：

激光诱导损伤是导致熔石英真空光学元件突发破裂的根本原因。本工作采用神光-Ⅲ原型装置终端光学组件的熔石英真空光学元件制作了标准样品, 统计分析了熔石英玻璃样品表面损伤形貌特征, 探究了激光诱导损伤对熔石英玻璃样品弯曲强度的影响。结果表明: 激光诱导熔石英玻璃损伤点形貌为典型的半椭球体, 损伤点深度随其长度增大呈上升趋势, 深度极限基本不超过2 mm; 损伤点对熔石英玻璃弯曲强度影响非常明显, 含损伤点的样品平均弯曲强度仅为不含损伤点样品平均弯曲强度的41%。随着损伤点长度和深度增大, 熔石英玻璃的弯曲强度总体呈下降趋势, 但当损伤点长度大于15 mm, 弯曲强度下降趋势明显缓和, 损伤点长深比对弯曲强度无明显影响。熔石英玻璃真空窗口光学元件安全设计, 应考虑玻璃弯曲强度离散性及持久应力作用综合影响, 且在损伤点位置处的最大弯曲拉应力不应超过其弯曲强度设计值。

关键词: 真空窗口光学元件, 熔石英玻璃, 激光诱导损伤, 弯曲强度, 安全设计

Abstract:

Laser-induced damage is the fundamental cause of sudden rupture of fused silica vacuum optical elements. To investigate this damage on bending strength weakening to find safety design method, standard samples were made with fused silica vacuum optical elements in the final optics assembly of the SG-III prototype laser facility. The surface damage morphological characteristics of fused silica glass samples were statistically analyzed, and the influence of laser-induced damage on bending strength of fused silica glass samples was investigated. The results show that the damage morphology of laser-induced fused silica glass is typically semi-ellipsoid, the depth of the damage point increases with its length which is no more than 2 mm; The damage point has obvious influence on the bending strength of fused silica glass, whose average bending strength with damage point is only 0.41 times that of the samples without damage point. With increase of the length and depth of the damage point, the bending strength of the samples generally decrease. But when the length of the damage point exceeding 15 mm, its bending strength downward trend is significantly moderated, the ratio of length to depth of the damage point has no obvious effect on the bending strength. These data suggest that designing safe optical elements of fused silica glass vacuum window should comprehensively take into account dispersion of glass bending strength, persistent effect of the stress, and the maximum bending tensile stress distributed near the damage point should not exceed the design value of bending strength.

Key words: vacuum window optical element, fused silica glass, laser-induced damage, bending strength, safety design

中图分类号:

TQ174

靳赛, 刘小根, 齐爽, 赵润昌, 李志军. 激光诱导损伤对熔石英玻璃弯曲强度弱化影响及安全设计[J]. 无机材料学报, 2023, 38(6): 671-677.

JIN Sai, LIU Xiaogen, QI Shuang, ZHAO Runchang, LI Zhijun. Fused Silica Glass: Laser-induced Damage on Bending Strength Weakening and Safety Design[J]. Journal of Inorganic Materials, 2023, 38(6): 671-677.

图/表 12

图1 含损伤点熔石英玻璃真空窗口光学元件照片

Fig. 1 Photo of optical elements with damage points in the fused silica glass vacuum window

图2 样品示意图及实物照片

Fig. 2 Diagram and physical picture of the sample

图3 样品上损伤点形貌示意图

Fig. 3 Diagram of the damage point in a sample

图4 损伤点形貌尺寸测量

Fig. 4 Measurement of morphology and size of damage point (a) Maximum size (2a); (b) Maximum depth (c)

图5 各测试样品中损伤点损伤长度(2a)与深度(c)分布

Fig. 5 Damage length (2a) and depth (c) of the damage points in various samples

图6 含损伤点和不含损伤点样品平均弯曲强度的测试结果

Fig. 6 Test results of average bending strength of the samples with and without damage point

图7 损伤点长度与样品弯曲强度对应关系

Fig. 7 Relationship between damage point length and bending strength of the samples

图8 通过拟合处理获得的损伤点长度与样品弯曲强度对应关系曲线

Fig. 8 Fitting curve between damage point length and bending strength of the samples

表1 不同损伤点尺寸对应的熔石英玻璃弯曲强度反演值

Table 1 Inversion values of bending strength of fused silica glass corresponding to different damage point sizes

Length/mm	Bending strength/MPa	Length/mm	Bending strength/MPa
0	75.9	21	26.05
1	39.86	22	25.88
2	36.18	23	25.72
3	34.19	24	25.57
4	32.84	25	25.42
5	31.83	26	25.28
6	31.03	27	25.15
7	30.37	28	25.02
8	29.81	29	24.90
9	29.32	30	24.78
10	28.89	31	24.67
11	28.51	32	24.56
12	28.17	33	24.45
13	27.85	34	24.35
14	27.57	35	24.25
15	27.30	36	24.16
16	27.06	37	24.07
17	26.83	38	23.98
18	26.62	39	23.89
19	26.42	40	23.81
20	26.23	-	-

图9 损伤点深度与样品弯曲强度对应关系

Fig. 9 Relationship between damage point depth and bending strength of the samples

图10 损伤点长深比(2a/c)与样品弯曲强度对应关系

Fig. 10 Relationship between 2a/c values of the damage point and bending strength of the samples

表2 不同受载持续时间下的K2及K值

Table 2 K2 and K values of the fused silica glass under various load action time

Load action time	K₁	K₂	K
≤1 min	2.5	1.00	2.50
1 d	2.5	1.85	4.63
30 d	2.5	2.27	5.68
180 d	2.5	2.50	6.25
1 a	2.5	2.63	6.58
3 a	2.5	2.78	6.95
5 a	2.5	2.94	7.35

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激光诱导损伤对熔石英玻璃弯曲强度弱化影响及安全设计

Fused Silica Glass: Laser-induced Damage on Bending Strength Weakening and Safety Design

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