Progress of Study on ZnO Thin Film and its Properties

Abstract

Abstract: ZnO thin films are the materials with many excellent properties such as piezoeletricity, conductivity,
optical absorption and emission, gas-sensitivity, and highly nonlinear voltage-current characteristics. They have a wide variety of applications
such as transparent conductors, luminescence diode, window materials for solar cells, optical wave guides, phosphor for monochrome field emission
displays, piezoelectric transducers in the GHz range, surface acoustic wave devices, micro-sensors and micro-actuators, and low-voltage varistors.
There are many methods for the preparation of ZnO thin films, and each has its advantages and disadvantages. The properties of ZnO thin films depend on the dopants and the preparation conditions. This paper reviews the
preparations and properties of ZnO thin films, and discusses their development prospects.

Key words: ZnO thin film, preparation methods, properties, development prospects

CLC Number:

O484

HUANG Yan-Qiu,LIU Mei-Dong,ZENG Yi-Ke,LIU Shao-Bo. Progress of Study on ZnO Thin Film and its Properties[J]. Journal of Inorganic Materials.

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