PZT Ferroelectrics Thin Films Used in MEMS

Journal of Inorganic Materials

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PZT Ferroelectrics Thin Films Used in MEMS

YU Xiao, ZHANG Zhi-Sheng, HU Ming

School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China

Received:2003-12-29 Revised:2004-03-19 Published:2005-01-20 Online:2005-01-20

Abstract

Abstract: With the development of thin film fabrication processes, there are many ferroelectrics thin films applied in MEMS. The fabrication of MEMS devices using ferroelectrics thin films
depends upon the ability to pattern the films. The useful properties of ferroelectrics thin films, especially PZT thin films, were introduced,
and some examples about the MEMS based on the ferroelectrics thin films were discussed.

Key words: MEMS, ferroelectrics thin films, PZT, micro fabrication, pattern

CLC Number:

TN305
TB43

YU Xiao,ZHANG Zhi-Sheng,HU Ming. PZT Ferroelectrics Thin Films Used in MEMS[J]. Journal of Inorganic Materials.

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PZT Ferroelectrics Thin Films Used in MEMS

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