Oxidation Behavior of Aluminium Nitride

Abstract

Abstract: The effects of atmosphere and humidity at different temperatures on the behavior of aluminium nitride were investigated. The resules obtained show that the oxidation behavior was greatly affected by the humidity. The oxidation of aluminium nitride at 1225℃ in wet N₂, wet N₂:O₂=10:1 and wet air follows a parabolic rate law, while the oxidation in dry air follows a linear rate law. On the other hand, the oxidation kinetics in dry air is linear between 1100℃and 1300℃ with an activation energy of 233kJ/mol, and then arabolic above 1300℃

Key words: aluminium nitride, oxidation behavior, linear rate law, parabolic rate law

CLC Number:

TQ174

XU Xin-Rui,YAN Wei-Lin,ZHUANG Han-Rui,LI Wen-Lan,XU Su-Ying. Oxidation Behavior of Aluminium Nitride[J]. Journal of Inorganic Materials.

[1]	TAN Min, CHEN Xiaowu, YANG Jinshan, ZHANG Xiangyu, KAN Yanmei, ZHOU Haijun, XUE Yudong, DONG Shaoming. Microstructure and Oxidation Behavior of ZrB₂-SiC Ceramics Fabricated by Tape Casting and Reactive Melt Infiltration [J]. Journal of Inorganic Materials, 2024, 39(8): 955-964.
[2]	JIANG Lingyi, PANG Shengyang, YANG Chao, ZHANG Yue, HU Chenglong, TANG Sufang. Preparation and Oxidation Behaviors of C/SiC-BN Composites [J]. Journal of Inorganic Materials, 2024, 39(7): 779-786.
[3]	Shu-Guang ZHOU, Yi-Jun GUO, Xiao LIU. Simulation of ZrB₂ Oxidation Behavior at Constant Temperature Ambient [J]. Journal of Inorganic Materials, 2019, 34(6): 660-666.
[4]	LI Xiao-Lei, WANG Hong-Liang, ZHANG Qin-Shan, WANG Li-Ying, LI Shang-Sheng, SU Tai-Chao. Study on Grain Fragmentation of Aluminum Nitride Microcrystal under High Pressure [J]. Journal of Inorganic Materials, 2012, 27(12): 1313-1316.
[5]	LI Xiao-Lei-1, 2 , LI De-You-3, WANG Li-YIng-1, LI Chang-Sheng-1, SU Tai-Chao-1, MA Hong-An-2, JIA Xiao-Feng-1, 2. Effect of High Pressure Annealing on Microstructure and Thermal Conductivity of Aluminum Nitride Ceramics [J]. Journal of Inorganic Materials, 2010, 25(5): 537-540.
[6]	XUE Jian-Feng,LI Jun,ZHOU Guo-Hong,ZHANG Hai-Long,WANG Shi-Wei. Fabrication of Aluminium Nitride by Electrophoretic Deposition [J]. Journal of Inorganic Materials, 2009, 24(6): 1151-1154.
[7]	OUYANG Hai-Bo,LI He-Jun,QI Le-Hua,LI Zheng-Jia,WEI Jian-Feng. Microstructure and Oxidation Behavior of the SiC/PyC Multilayer Coated Carbon Fibers [J]. Journal of Inorganic Materials, 2009, 24(1): 103-106.
[8]	ZHANG Wei-Hua,CHENG Lai-Fei,ZHANG Li-Tong,YANG Wen-Bin,LIU Yong-Sheng,XU Yong-Dong. Preparation and Anti-oxidation Behavior of Si-C-B Self-healing Coating on C/SiC Composite [J]. Journal of Inorganic Materials, 2008, 23(4): 774-778.
[9]	ZHANG Xia,CHEN Tong-Lai,LI Xiao-Min. Highly-oriented A1N Thin Films on Si(100) Substrates by Pulsed Laser Deposition [J]. Journal of Inorganic Materials, 2005, 20(2): 419-424.
[10]	FU Ren-Li,CHEN Ke-Xin,ZHOU He-Ping,Ferreira J. M. F. Highly Crystalline AlN Particles Synthesised by SHS Method [J]. Journal of Inorganic Materials, 2004, 19(6): 1402-1406.
[11]	DUAN Cheng-Jun,WANG Qun,WANG Cong-Zeng,GAO Fan,ZHAO Jing-Tai. [J]. Journal of Inorganic Materials, 2004, 19(5): 1011-1017.
[12]	XU Xiao-Hong,WU Hai-Shun,MA Wen-Jin,DUAN Jing-Fang,LI Zuo-Yi. Study on the Texture of AIN Thin Films by Using the Pole-figure Method [J]. Journal of Inorganic Materials, 2003, 18(2): 490-494.
[13]	QIN Ming-Li,QU Xuan-Hui,LIN Jian-Liang,XIAO Ping-An,ZHU Bao-Jun. Synthesis of Ultrafine Aluminium Nitride Powder by a Low-temperature Carbothermal Reduction Process [J]. Journal of Inorganic Materials, 2002, 17(5): 1054-1058.
[14]	XU Xiao-Hong,ZHANG Fu-Qiang,WU Hai-Shun,ZHANG Cong-Jie,LI Zuo-Yi. Function Relation Formulae Between Experimental Parameters and Preferential Orientation Intensity of AlN Films [J]. Journal of Inorganic Materials, 2001, 16(6): 1161-1168.
[15]	CAO Jun,ZHANG Qing-Xue,ZHUANG Han-Rui,WU Feng-Ying. Tape Casting Process of Aluminium Nitride Substrate [J]. Journal of Inorganic Materials, 2001, 16(2): 269-276.

Oxidation Behavior of Aluminium Nitride

PDF (PC)

Knowledge

Cited

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments