Journal of Inorganic Materials ›› 2013, Vol. 28 ›› Issue (7): 691-695.DOI: 10.3724/SP.J.1077.2013.12490

• Research Paper • Previous Articles     Next Articles

Preparation of Nano-scaled TiO2-xNx Photocatalyst by PEALD in-situ Doping

RAO Zhi-Peng, WAN Jun, FENG Jia-Heng, LI Chao-Bo, XIA Yang   

  1. (Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China)
  • Received:2012-08-10 Revised:2012-12-10 Published:2013-07-20 Online:2013-06-19
  • About author:RAO Zhi-Peng. E-mail: raozhipeng@ime.ac.cn
  • Supported by:

    National Science and Technology Major Project (2009ZX02037-003); China Postdoctoral Science Foundation (2011M500996); Opening Project of Key Laboratory of  Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences

Abstract: TiO2-xNx photocatalyst was deposited by plasma-enhanced atomic layer deposition (PEALD) system using in-situ doping method. X-ray photoelectron spectroscope (XPS), high-resolution transmission electron microscope (HRTEM), photoluminescence (PL), UV-Vis spectra were used to characterize the photocatalyst, and the variation of water contact angles and photocatalytic decomposition property of TiO2-xNx nano films to methylene orange (MO) solution under visible light were investigated. The results show that the incorporated nitrogen structures could be adjusted by plasma powers, and substitutional atoms are mainly formed in the TiO2 films deposited at the plasma power of 50 W, which is about ~1.22at%. The crystal type is anatase (101). No defect is observed in the TiO2-xNx films, and the recombination rate of the photo-generated electron-hole pairs is lower, which is conducive to the improvement of the photocatalytic efficiency. This method solves the problem of the formation of oxygen vacancies in the classic ALD growth process to prepare TiO2-xNx photocatalysts and the TiO2-xNx nano films realize visible absorption and visible light photocatalytic activity under visible light irradiation (λ<800 nm).

Key words: PEALD, in-situ; TiO2-xNx, photocatalyst

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