Influence of Mn-doping on the Structure and Optical Properties of ZnO Thin Film

doi:10.3724/SP.J.1077.2007.00911

Abstract

Abstract: Highly c-axis oriented ZnO and Zn_0.9Mn_0.1O thin films were fabricated on Si substrates by pulsed laser deposition. Photoluminescence results show that Mn atoms doping induces the blue-shift of UV emission. At the same time, the intensity of UV emission decreases, while green emission increases. X-ray diffraction, X-ray absorption fine structure and X-ray photoelectron spectroscopy were employed to characterize the influence of Mn-doping on properties of ZnO thin films. The results indicate that Zn_0.9Mn_0.1O alloy forms after Mn doping in ZnO. Mn atoms enter into the ZnO crystal lattice and substitute Zn atoms with Mn²⁺ state. As a result, the band gap of Zn_0.9Mn_0.1O increases, which is associated with the UV emission blue-shift. Furthermore, the reaction between the doped Mn and interstitial Zinc atoms(Zn_i) prompts the decay of samples' crystallinity. Thus, interstitial Zinc atoms(Zn_i) decrease and the oxygen vacancy (V_O) increases, showing the intensity weakening of the UV and violet emission, and the increasing of green emission of the film samples.

Key words: inc oxide, pulsed laser deposition, X-ray absorption fine structure, X-ray photoelectron spectroscopy, photoluminescence

CLC Number:

O484

SUN Bai,ZHAO Chao-Yang,XU Peng-Shou,Zhang Guo-Bin,WEI Shi-Qiang. Influence of Mn-doping on the Structure and Optical Properties of ZnO Thin Film
[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2007.00911.

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