Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design

doi:10.15541/jim20200633

Journal of Inorganic Materials ›› 2021, Vol. 36 ›› Issue (5): 479-484.DOI: 10.15541/jim20200633

Special Issue: 电致变色材料与器件；电致变色专栏2021

• TOPLCAL SECTION • Previous Articles Next Articles

Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design

JIA Hanxiang¹^,²(), SHAO Zewei¹^,², HUANG Aibin¹, JIN Pingshi¹, CAO Xun¹()

1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
2. University of Chinese Academy of Sciences, Beijing 100049, China

Received:2020-11-05 Revised:2020-11-25 Published:2021-05-20 Online:2021-04-19
Contact: CAO Xun, professor. E-mail: cxun@mail.sic.ac.cn
About author:JIA Hanxiang(1993-), male, PhD candidate. E-mail:jiahanxiang@student.sic.ac.cn
Supported by:
National Natural Science Foundation of China(51972328);National Natural Science Foundation of China(51903244);Youth Innovation Promotion Association, Chinese Academy of Sciences(2018288);Science Foundation for Youth Scholar of State Key Laboratory of High Performance Ceramics and Superfine Microstructures(SKL201703);Shanghai Pujiang Program(18PJD051);Key Research and Development Plan of Anhui Province(1804a09020061);Shanghai Sailing Program(19YF1454300)

Abstract

Abstract:

The all-solid-state electrochromic devices (ECDs) have been widely developed for energy-saving windows, screen displays, multi-functional energy storage devices due to their characteristics such as large optical contrast, fast switching speed and good cycle stability. However, traditional all-solid-state ECDs based on monolayer electrolyte system are often limited by ordinary optical transmittance and inadequate sputtering efficiency. Herein, the all-solid- state ECDs integrated with LiAlO_x/Ta₂O₅/LiAlO_x (ATA) sandwich structured electrolyte were successfully fabricated by reactive DC magnetron sputtering technique. By means of introduction of ATA sandwich structured electrolyte, the prepared ECDs with seven layer (ITO/NiO/LiAlO_x/Ta₂O₅/LiAlO_x/WO₃/ITO) was endowed with superfine optical transmittance and substantial sputtering efficiency simultaneously. The ATA-based ECDs realized satisfactory coloration efficiency of 79.6 cm²/C, fast switching speed as short as 1.9 s for coloring and 1.6 s for bleaching, and excellent cycling stability over hundreds of cycles. Furthermore, ATA sandwich structured electrolyte makes full use of the excellent ionic conductivity and stability of Ta₂O₅, as well as enough lithium ions to meet the demand for fast color switching. Hence, ATA-based all-solid-state ECDs by continuous DC sputtering is expected to provide effective guidance for the mass production and practical application of the high-performance ECDs.

Key words: inorganic all-solid-state, electrochromic device, multilayer electrolyte, sputtering efficiency, optical design

CLC Number:

TQ174

JIA Hanxiang, SHAO Zewei, HUANG Aibin, JIN Pingshi, CAO Xun. Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design[J]. Journal of Inorganic Materials, 2021, 36(5): 479-484.

Figures/Tables 6

References 26

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Layer	Target	Pressure/Pa	Q_Ar : Q_O2	Power/W	Thickness/nm
LiAlO_x^a	Li-Al	2.0	40 : 10	200	~100
Ta₂O₅	Ta	0.7	45 : 5	200	~200
LiAlO_x^b	Li-Al	2.0	40 : 10	200	~100
WO_x	W	1.0	47 : 3	70	400
NiO	Ni	1.0	40 : 10	100	150
ITO	ITO	0.3	100 : 0	140	400

Layer	Target	Pressure/Pa	Q_Ar : Q_O2	Power/W	Thickness/nm
LiAlO_x^a	Li-Al	2.0	40 : 10	200	~100
Ta₂O₅	Ta	0.7	45 : 5	200	~200
LiAlO_x^b	Li-Al	2.0	40 : 10	200	~100
WO_x	W	1.0	47 : 3	70	400
NiO	Ni	1.0	40 : 10	100	150
ITO	ITO	0.3	100 : 0	140	400

Layer	Target	Power supply	Power density/(W·cm^-2)	Sputtering rate/ (nm·min^-1)	Sputtering efficiency/ ((nm·min^-1)/(W·cm^-2))	Ref.
Ta₂O₅	Ta₂O₅	RF	0.57	2.7	4.74	[23]
Ta₂O₅	Ta	DC	0.89	15	16.85	This work
LiTaO₃	LiTaO₃	RF	0.48	1.2	2.50	[24]
LiAlO_x	Li-Al	DC	0.16	1	6.25	This work
WO_x	WO₃	RF	1.78	5	2.81	[25]
WO_x	W	DC	0.40	16	40	This work
NiO	NiO	RF	0.64	3.6	5.63	[26]
NiO	Ni	DC	0.32	5	15.63	This work

Layer	Target	Power supply	Power density/(W·cm^-2)	Sputtering rate/ (nm·min^-1)	Sputtering efficiency/ ((nm·min^-1)/(W·cm^-2))	Ref.
Ta₂O₅	Ta₂O₅	RF	0.57	2.7	4.74	[23]
Ta₂O₅	Ta	DC	0.89	15	16.85	This work
LiTaO₃	LiTaO₃	RF	0.48	1.2	2.50	[24]
LiAlO_x	Li-Al	DC	0.16	1	6.25	This work
WO_x	WO₃	RF	1.78	5	2.81	[25]
WO_x	W	DC	0.40	16	40	This work
NiO	NiO	RF	0.64	3.6	5.63	[26]
NiO	Ni	DC	0.32	5	15.63	This work

Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design

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