脉冲偏压电弧离子镀制备C1-x-yNxZry超硬复合薄膜

doi:10.3724/SP.J.1077.2010.00517

无机材料学报 ›› 2010, Vol. 25 ›› Issue (5): 517-521.DOI: 10.3724/SP.J.1077.2010.00517 CSTR: 32189.14.SP.J.1077.2010.00517

脉冲偏压电弧离子镀制备C_1-x-yN_xZr_y超硬复合薄膜

李红凯, 林国强, 董闯

大连理工大学三束材料改性教育部重点实验室, 大连 116024

收稿日期:2009-09-04 修回日期:2009-10-22 出版日期:2010-05-20 网络出版日期:2010-05-12

Superhard C_1-x-yN_xZr_yComposite Films Prepared by Pulsed Bias Arc Ion Plating

LI Hong-Kai, LIN Guo-Qiang, DONG Chen

Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology,Dalian 116024, China

Received:2009-09-04 Revised:2009-10-22 Published:2010-05-20 Online:2010-05-12

摘要/Abstract

摘要：

用脉冲偏压电弧离子镀方法在保持石墨靶弧流恒定的条件下, 通过同步改变锆靶弧流与氮流量,在硬质合金基体上制备了一系列不同成分的C_1-x-yN_xZr_y复合薄膜. 随着锆靶弧流与N流量增加, 薄膜中Zr与N含量都呈线性增加, 同时C含量快速减少. Raman光谱显示所制备的薄膜具有DLC特征, 而XRD结果显示薄膜中还存在有明显的ZrN晶体相, 说明本实验所制备的薄膜属于在DLC非晶基体上匹配有ZrN晶体相的碳基复合薄膜. 随Zr与N含量增加，薄膜硬度先增大后降低, 当x=0.19, y=0.28时薄膜具有最高硬度值, 为43.6GPa, 达到了超硬薄膜的硬度值.

关键词: 类金刚石薄膜, 超硬复合薄膜, 脉冲偏压, 电弧离子镀

Abstract:

A series of C_1-x-yN_xZr_ycomposite films were deposited on a cemented carbide substrate using pulsed bias arc ion plating by adjusting the nitrogen flow rate and the Zr target arc current simultaneously with the graphite target arc current fixing. The Zr and N contents in the films increase linearly while the C content shows an inverse trend as the Zr target arc current and N flow rate increase. The Raman spectra indicate that the deposited films are the characteristic diamondlike carbon. XRD results show that the ZrN crystalline phase is formed in the films. The hardness first increases and then decreases with increasing Zr and N contents, reaching the highest superhard value of 43.6GPa at x=0.19, y=0.28.

Key words: DLC film, superhard composite film, pulsed bias, arc ion plating

中图分类号:

TB43

李红凯, 林国强, 董闯. 脉冲偏压电弧离子镀制备C_1-x-yN_xZr_y超硬复合薄膜[J]. 无机材料学报, 2010, 25(5): 517-521.

LI Hong-Kai, LIN Guo-Qiang, DONG Chen. Superhard C_1-x-yN_xZr_yComposite Films Prepared by Pulsed Bias Arc Ion Plating[J]. Journal of Inorganic Materials, 2010, 25(5): 517-521.

参考文献

[1]Robertson J. Diamond-like amorphous carbon.Materials Science and Engineering R,2002, 37(4/5/6):129-281
[2]Hainsworth S V, Uhure N J. Diamond like carbon coatings for tribology: production techniques, characterization methods and applications.International Materials Reviews,2007, 52(3):153-174
[3]Robertson J. Improving the properties of diamond-like carbon.Diamond and Related Materials,2003, 12(2):79-84
[4]Liu E, Shi X, Tan H S, et al. The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc.Surface and Coatings Technology,1999, 120-121:601-606
[5]Tan M L, Zhu J Q, Han J C, et al. Raman characterization of boron doped tetrahedral amorphous carbon films.Materials Research Bulletin,2008, 43(2):453-462
[6]Lee C S, Lee K R, Eun K Y, et al. Structure and properties of Si incorporated tetrahedral amorphous carbon films prepared by hybrid filtered vacuum arc process.Diamond and Related Materials,2002, 11(2):198-203
[7]Singh V, Jiang J C, Meletis E I. Cr-diamondlike carbon nanocomposite films:Synthesis, characterization and properties.Thin Solid Films,2005, 489(1/2):150-158
[8]Wang D Y, Chang C L, Ho W Y. Oxidation behavior of diamond-like carbon films.Surface and Coatings Technology,1999, 120-121:138-144
[9]Inkin V N, Kirpilenko G G, Dementjev A A, et al. A superhard diamond-like carbon film.Diamond and Related Materials,2000, 9(3-6):715-721
[10]Byon E, Kim J K, Rha J J, et al. Effect of metal ion implantation on thermal instability of diamond-like carbon films.Surface & Coatings Technology,2007, 201(15):6670-6673
[11]Chen C C, Hong F C N. Structure and properties of diamond-like carbon nanocomposite films containing copper nanoparticles.Applied Surface Science,2005, 242(3/4):261-269
[12]Veprek S, Reiprich S. A concept for the design of novel superhard coatings.Thin Solid Films,1995, 268(1/2):64-71
[13]Musil J. Hard and superhard nanocomposite coatings.Surface and Coatings Technology,2000, 125(1/2/3):322-330
[14]Ferrari A C, Robertson J. Interpretation of Raman spectra of disordered and amorphous carbon.Physical Review B,2000, 61(20):14095-14107
[15]蒋娜娜, 邵天敏, 陈大融(JIANG Na-Na, et al). 利用脉冲激光真空弧沉积技术制备类金刚石薄膜.无机材料学报(Journal of Inorganic Materials), 2005, 20（1）：187-192.
[16]Ferrari A C. Determination of bonding in diamond-like carbon by Raman spectroscopy.Diamond and Related Materials,2002, 11(3-6):1053-1061
[17]Tay B K, Cheng Y H, Ding X Z, et al. Hard carbon nanocomposite films with low stress.Diamond and Related Materials,2001,10(3-7):1082-1087
[18]Zhang S, Sun D, Fu Y Q, et al. Recent advances of superhard nanocomposite coatings: a review.Surface and Coatings Technology,2003, 167(2/3):113-119
[19]赵红雨, 范秋林, 宋力昕, 等(ZHAO Hong-Yu, et al). 纳米复合超硬薄膜的研究现状.无机材料学报(Journal of Inorganic Materials), 2004, 19（1）：9-16.
[20]Veprek S. The search for novel, superhard materials.Journal of Vacuum Science and Technology A,1999, 17(5):2401-2420

脉冲偏压电弧离子镀制备C_1-x-yN_xZr_y超硬复合薄膜

Superhard C_1-x-yN_xZr_yComposite Films Prepared by Pulsed Bias Arc Ion Plating

PDF (PC)

可视化

被引次数

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 8

编辑推荐

Metrics

本文评价

[1]	赵志翰, 郭鹏, 魏菁, 崔丽, 刘山泽, 张文龙, 陈仁德, 汪爱英. Ti-DLC薄膜压阻性能及载流子输运行为研究[J]. 无机材料学报, 2024, 39(8): 879-886.
[2]	程玮杰, 王明磊, 林国强. 电弧离子镀CrAlN-DLC硬质复合薄膜的成分、结构与性能[J]. 无机材料学报, 2022, 37(7): 764-772.
[3]	莫亚杰,王明磊,程玮杰,林国强. 电弧离子镀Cr_1-_xAl_xN硬质薄膜的成分、结构与性能[J]. 无机材料学报, 2020, 35(6): 675-681.
[4]	姜金龙, 王琼, 黄浩, 张霞, 王玉宝, 耿庆芬. 紫外光辐照下钛硅共掺杂类金刚石薄膜微结构的演化[J]. 无机材料学报, 2014, 29(9): 941-946.
[5]	蒋娜娜,邵天敏,陈大融. 利用脉冲激光真空弧沉积技术制备类金刚石薄膜[J]. 无机材料学报, 2005, 20(1): 187-192.
[6]	张勤俭,张建华,李敏,张勤河,秦勇. 电弧离子镀TiN涂层陶瓷刀片的力学性能和界面结构[J]. 无机材料学报, 2002, 17(2): 371-374.
[7]	黄立业,徐可为,吕坚. 类金刚石薄膜的表面纳米划擦性能评价[J]. 无机材料学报, 2001, 16(5): 1004-1008.
[8]	程宇航,吴一平,邹柳娟,陈建国,乔学亮,谢长生,翁惠民. 类金刚石薄膜的慢正电子分析[J]. 无机材料学报, 1998, 13(2): 214-218.

脉冲偏压电弧离子镀制备C1-x-yNxZry超硬复合薄膜

Superhard C1-x-yNxZry Composite Films Prepared by Pulsed Bias Arc Ion Plating

PDF (PC)

可视化

被引次数

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 8

编辑推荐

Metrics

本文评价

脉冲偏压电弧离子镀制备C_1-x-yN_xZr_y超硬复合薄膜

Superhard C_1-x-yN_xZr_yComposite Films Prepared by Pulsed Bias Arc Ion Plating