飞秒激光烧蚀MgAl2O4透明陶瓷的实验研究

doi:10.3724/SP.J.1077.2007.00328

无机材料学报

飞秒激光烧蚀MgAl₂O₄透明陶瓷的实验研究

余本海^1,2, 戴能利¹, 李玉华¹, 郑启光¹, 陆培祥¹

1. 华中科技大学武汉光电国家实验室激光科学与技术部, 光电子科学与工程学院, 武汉 430074; 2. 信阳师范学院物理电子工程学院, 信阳 464000

收稿日期:2006-04-17 修回日期:2006-06-30 出版日期:2007-03-20 网络出版日期:2007-03-20

Experimental Study on the Ablation of MgAl2O4 Transparent Ceramic by a Femtosecond Laser

YU Ben-Hai^1,2, DAI Neng-Li¹, LI Yu-Hua¹, ZHENG Qi-Guang¹, LU Pei-Xiang¹

1. Wuhan National Laboratory for Optoelectronics and Institute of Optoelectronics Science & Engineering, Huazhong University of Science and
Technology, Wuhan 430074, China; 2. College of Physics & Electronics Engineering, Xinyang Normal University, Xinyang 464000, China

Received:2006-04-17 Revised:2006-06-30 Published:2007-03-20 Online:2007-03-20

摘要/Abstract

摘要：

实验研究了800nm飞秒激光与MgAl₂O₄透明陶瓷的相互作用, 得到其在单脉冲、多脉冲情况下的损伤阈值和损伤面积, 用CCD成像技术和扫描电镜观察了烧蚀点的形貌特征, 用显微红外光谱仪测试了烧蚀区域的透过光谱. 结果表明: 单脉冲烧蚀条件下, 烧蚀面积与脉冲能量近似为线性关系, 而在多脉冲烧蚀条件下, 烧蚀面积随着脉冲数量的增加呈近似波尔兹曼(Boltzmann)增大; 当激光功率接近损伤阈值时, 烧蚀后的区域在波数为2500～7000cm^-1范围内的红外透过率由82%提高到86%, 当激光功率超过损伤阈值后, 透过率降低20%左右.

关键词: 飞秒激光, MgAl2O4透明陶瓷, 损伤阈值, 红外透过率

Abstract:

The damage threshold and ablation area for MgAl₂O₄ transparent ceramic (MATC) by a femtosecond laser pulse at a wavelength of 800nm were studied. The ablated spots were examined by means of a charge coupled device (CCD) camera and a scanning electron microscope (SEM). The IR transmission properties of MATC machined by femtosecond laser pulses were measured by a micro-IR spectrum device. The result shows that the damaged area exhibits a linear dependence with the increase of pulse energies under the condition of a single pulse, and the area is Boltzmann distribution with the increase of the pulse number under the condition of multipule pulses. The ablated spot under optimized energy pulses (near the damage threshold energy) can improve the IR transmission from 82% to 86% in the band of 2500-7000cm^-1 for MATC. When the pulse energy exceeds the threshold energy, the transmission of MATC decreases rapidly by 20%.

Key words: femtosecond laser, MgAl2O4 transparent ceramic, damage threshold, IR transmission

中图分类号:

O739

余本海,戴能利,李玉华,郑启光,陆培祥. 飞秒激光烧蚀MgAl₂O₄透明陶瓷的实验研究[J]. 无机材料学报, DOI: 10.3724/SP.J.1077.2007.00328.

YU Ben-Hai,DAI Neng-Li,LI Yu-Hua,ZHENG Qi-Guang,LU Pei-Xiang. Experimental Study on the Ablation of MgAl2O4 Transparent Ceramic by a Femtosecond Laser
[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2007.00328.

参考文献

[1] Davis K M, Miura K, Sugimoto N, et al. Opt. Lett., 1996, 21: 1729-1731.
[2] Saliminia A, Nguyen N T, Chin S L, et al. Optics Communications, 2004, 241: 529-538.
[3] Shen M Y, Crouch C H, Carey J E, et al. Appl. Phys. Lett., 2003, 82: 1715-1717.
[4] Adela Ben-Yakar, Robert L. Byer,. Anthony Harkin, et al. Appl. Phys. Lett., 2003, 83: 3030-3032.
[5] Chris B. Schaffer, Alan O. Jamison, and Eric Mazur. Appl. Phys. Lett., 2004, 84: 1441-1443.
[6] James W. Chen, Thomas R. Huser, Subhash H. Risbud, et al. Appl. Phys. Lett., 2003, 82: 2371-2733.
[7] Natura U, Feurer T, Ehrt D. Nuclear Instruments and Methods in Physics Research B, 2000, 166-167: 470-475.
[8] Miura K, Qiu Jianrong, Mitsuyu T, et al. Journal of Non-Crystalline Solids, 1999, 256 & 257: 212-219.
[9] Jiang Chengyong, Zhou Guoqing, Xu Jun, et al. Journal of Crystal Growth, 2004, 260: 181-185.
[10] Dyer P E, Maswadi S M, et al. Opt. Commun., 1986, 60: 296-297.
[11] Efimov O M, Glebov L B, Richardson K A, et al. Optical Materials, 2001, 17: 379-386.
[12] Hirao K, Miura K. Journal of Non-Crystalline Solids, 1998, 239: 91-95.
[13] Fukuda Takeshi, Ishikawa Shimon, TomokoFujii Tomoko, et al.
Proceeding of SPIE-The International Society for Optical Engineering, V5339, Photo Processing in Microelectronics and Photonic Ⅲ, 2004. 524-538.
[14] Qiu Jianrong, Mitsuru S, Takayuki N, et al. Appl. Phys. Lett., 2002, 81: 3040-3042.
[15] 邓蕴沛, 贾天卿, 冷雨欣, 等. 物理学报, 2004, 53 (7): 2216-2220.
[16] 李晓溪, 贾天卿, 冯东海, 等. 物理学报, 2004, 53 (7): 2154-2158.
[17] 姜雄伟, 等(JIANG Xiong-Wei, et al). 无机材料学报(Journal of Inorganic Materials), 2003, 18 (1): 34-38.
[18] 姜雄伟, 邱建荣, 朱从善, 等. 物理学报, 2001, 50 (5): 871-874.
[19] 姜本学, 赵志伟, 潘守夔, 等. 量子电子学报, 2005, 22 (2): 135-141.
[20] Shimotsuma Y, Kazansky P G, Qiu J, et al. Phys. Rev. Lett., 2003, 91: 247405.
[21] 吉亚明, 等(JI Ya-Ming, et al). 无机材料学报(Journal of Inorganic Materials), 2004, 19 (2): 275-282.
[22] 黄存新, 雷牧云, 彭载学. 人工晶体学报, 2001, 30 (1): 67-71.
[23] 何捷, 林理彬, 卢勇, 等. 人工晶体学报, 2002, 31 (1): 63-66.

飞秒激光烧蚀MgAl₂O₄透明陶瓷的实验研究

Experimental Study on the Ablation of MgAl2O4 Transparent Ceramic by a Femtosecond Laser

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