无机材料学报 ›› 2012, Vol. 27 ›› Issue (8): 891-896.DOI: 10.3724/SP.J.1077.2012.12131 CSTR: 32189.14.SP.J.1077.2012.12131

• 研究快报 • 上一篇    

钨掺杂二氧化钒薄膜的THz波段相变性能的研究

毛 茂1, 黄婉霞1, 张雅鑫2, 颜家振1, 罗 轶1, 施奇武1, 蔡靖涵1   

  1. (1. 四川大学 材料科学与工程学院, 成都610064; 2. 电子科技大学 物理电子学院, 成都610054)
  • 收稿日期:2012-03-05 修回日期:2012-04-23 出版日期:2012-08-20 网络出版日期:2012-07-09
  • 作者简介:毛 茂. E-mail: maomaoscu@163.com
  • 基金资助:

    National Natural Science Foundation of China (61072036)

Study on Phase Transition Property of Tungsten-doped Vanadium Dioxide Thin Film at Terahertz Range

MAO Mao1, HUANG Wan-Xia1, ZHANG Ya-Xin2, YAN Jia-Zhen1, LUO Yi1, SHI Qi-Wu1, CAI Jing-Han1   

  1. (1. College of Material Science and Engineering, Sichuan University, Chengdu 610064, China; 2. College of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China)
  • Received:2012-03-05 Revised:2012-04-23 Published:2012-08-20 Online:2012-07-09
  • About author:MAO Mao(1985–), candidate of master degree. E-mail: maomaoscu@163.com
  • Supported by:

    National Natural Science Foundation of China (61072036)

摘要: 通过溶胶–凝胶法制备纯的VO2和W掺杂的VO2薄膜, 并且进行了XPS、AFM和XRD的分析与表征, 并观察了其微观形貌和结构. 同时研究了VO2和W掺杂VO2在红外光谱(λ=4 μm)和THz(0.3~1.0 THz)区域的金属–绝缘转变性能. 结果表明: 室温下W掺杂的VO2薄膜在红外和THz区域的初始透过率都比纯的VO2薄膜低. 在THz波段, W掺杂的VO2表现出更低的相变温度. 同时在VO2和W掺杂VO2相变过程中, 观察到了金属–绝缘转变和结构转变的现象, W掺杂VO2具有明显的峰位偏移现象.

关键词: 二氧化钒, 红外透过率, 太赫兹, 钨掺杂

Abstract: Vanadium dioxide and tungsten-doped (W-doped) vanadium dioxide thin films deposited by aqueous Sol-Gel method were characterized with several different techniques (i.e. X-ray photoelectron spectroscope, atomic force microscope, X-ray diffraction), to determine their morphology and microstructure. Their metal-to-insulator (MIT) phase transition behavior in infrared spectral region (λ=4 μm) and terahertz (THz) spectral region (0.3–1.0 THz) were observed respectivele. The results demonstrate that the transmittance of W-doped VO2 film at room temperature is visibly lower than that of undoped VO2 film in both infrared and terahertz spectral region. The transition temperature of W-doped VO2 film is also lower than that of undoped VO2 film in the THz range. The MIT and structural phase transition (SPT) are observed during the phase transition of VO2 and W-doped VO2, and an obvious change of peak position occurs in W-doped VO2 film.

Key words: vanadium dioxide, infrared transmittance, terahertz, tungsten doped

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