Ti合金化DLC膜的结构和力学性能

无机材料学报

Ti合金化DLC膜的结构和力学性能

江晓红¹; 陆小华¹; Rogachev A.V²; 金元生³

1. 南京工业大学化工学院, 南京 210009; 2. 白俄罗斯国立交通大学材料系, 戈梅利 246653; 3. 清华大学摩擦学国家重点实验室, 北京 100084

收稿日期:2001-07-20 修回日期:2001-10-12 出版日期:2002-07-20 网络出版日期:2002-07-20

Structure and Mechanical Properties of Ti Alloyed DLC Films

JIANG Xiao-Hong¹; Rogachev A. V^.2; LU Xiao-Hua¹; JIN Yuan-Sheng³

1. College of Chemical Engineering; Nanjing University of Technology; Nanjing 210009; China; 2. Be-larusian State University of Transport; Gomel 246653; Belarus; 3. State Key Laboratory of Tribology; Tsinghua University, Beijing 100084, China

Received:2001-07-20 Revised:2001-10-12 Published:2002-07-20 Online:2002-07-20

摘要/Abstract

摘要： 在一台УВНИПА-1型双激发源等离子弧薄膜沉积装置上制取Ti合金化DLC膜,用纳米硬度计、显微硬度计、原子力显微镜以及X射线衍射仪和光电子能谱仪等手段对薄膜的力学性能和结构进行了分析和测定.摩擦磨损试验在一台球-盘滑动磨损试验机上进行.比较了不同钛合金化程度的DLC膜及热处理前后的性能变化.结果表明,薄膜的力学性能与Ti含量有非单值关系,但摩擦系数随Ti含量增加而升高;热处理后薄膜显微硬度显著升高的原因是生成了碳化钛硬化相.

关键词: DLC膜, 薄膜沉积, 性能分析

Abstract: Ti alloyed DLC films were prepared with a УВНИПА-1 deposition device by dual-excitation energy source. The mechanical properties and structures of the films
were measured and analyzed by Nanoindenter, Microhardness Tester, Atomic Force Microscope, as well as X-ray diffraction and X-ray
Photoelectron Spectroscope. Tribological tests were carried out on a ball-disk friction and wear tester. The performance change of DLC
films with different Ti alloying was investigated in view of heat treatment. The results show that the mechanical properties of the
films are not monotonous with Ti contents, and the friction coefficient increases with Ti content; the obvious microhardness increase results
from the formation of hardened TiC phase.

Key words: DLC film, thin film deposition, performance analysis

中图分类号:

O484

江晓红,陆小华,Rogachev A.V,金元生. Ti合金化DLC膜的结构和力学性能[J]. 无机材料学报.

JIANG Xiao-Hong,Rogachev A. V.,LU Xiao-Hua,JIN Yuan-Sheng. Structure and Mechanical Properties of Ti Alloyed DLC Films[J]. Journal of Inorganic Materials.