Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究

无机材料学报

Ba_0.9Sr_0.1TiO₃薄膜的椭偏光谱研究

阳生红¹; 李辉遒¹; 张曰理¹; 莫党¹; 田虎永²; 罗维根²; 蒲兴华²; 丁爱丽²

1. 中山大学物理系, 广州 510275; 2. 中国科学院上海硅酸盐研究所无机功能开放实验室, 上海 200050

收稿日期:2000-04-04 修回日期:2000-05-19 出版日期:2001-03-20 网络出版日期:2001-03-20

Spectroscopic Ellipsometry Studies of Ba_0.9Sr_0.1Ti0₃ Thin Films

YANG Sheng-Hong¹; LI Hui-Qiu¹; ZHANG Yue-Li¹; MO Dang¹; TIAN Hu-Yong²; LUO Wei-Gen²; PU Xing-Hua²; DING Al-Li²

1. Department of Physics; Zhongshan University; Guangzhou 510275; China; 2. Laboratory of Functional Inorganic Materials; Chinese Academy of Science, Shanghai 200050, China

Received:2000-04-04 Revised:2000-05-19 Published:2001-03-20 Online:2001-03-20

摘要/Abstract

摘要： 用椭偏光谱仪首次在光子能量为２．１～５．２ｅＶ的范围内，测量了不同热处理温度下Ｂａ_０．９Ｓｒ_０．１ＴｉＯ_３（ＢＳＴ）薄膜的椭偏光谱，建立适当的拟合模型，并用Ｃａｕｃｈｙ色散模型描述ＢＳＴ薄膜的光学性质，用最优化法获得了所有样品的光学常数（折射率η和消光系数κ）谱及禁带能Ｅ_ｇ．比较这些结果，初步得到了ＢＳＴ薄膜的折射率η、消光系数κ和禁带能Ｅ_ｇ随退火温度变化的变化规律．

关键词: 椭偏光谱, 光学常数谱, BST薄膜

Abstract: Ellipsometric spectra of Ba_0.9Sr_0.1TiO₃ (BST) thin films with various annealing
temperatures were measured in the range of photon energy from 2.1 to 5.2eV. Constructing appropriate fitting models and describing optical properties
of the BST with Cauchy dispersion model, their optical constants (refractive index n and extinction coefficient k) spectra and band
gap E_g were determined by means of an optimization. Compared these results, we obtained the variation of the refractive index n,
the extinction coefficient k and the band gap E_g with annealing temperatures.

Key words: spectroscopic ellipsometry, optical constant spectra, BST films

中图分类号:

O484

阳生红,李辉遒,张曰理,莫党,田虎永,罗维根,蒲兴华,丁爱丽. Ba_0.9Sr_0.1TiO₃薄膜的椭偏光谱研究[J]. 无机材料学报.

YANG Sheng-Hong,LI Hui-Qiu,ZHANG Yue-Li,MO Dang,TIAN Hu-Yong,LUO Wei-Gen,PU Xing-Hua,DING Al-Li. Spectroscopic Ellipsometry Studies of Ba_0.9Sr_0.1Ti0₃ Thin Films[J]. Journal of Inorganic Materials.

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Ba_0.9Sr_0.1TiO₃薄膜的椭偏光谱研究

Spectroscopic Ellipsometry Studies of Ba_0.9Sr_0.1Ti0₃ Thin Films

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