直接感光法制备钛酸锶钡图形化薄膜及其性能研究

doi:10.3724/SP.J.1077.2008.00886

无机材料学报

直接感光法制备钛酸锶钡图形化薄膜及其性能研究

张卫华, 袁媛, 石春梅, 赵高扬

西安理工大学材料科学与工程学院, 西安 710048

收稿日期:2007-10-15 修回日期:2007-12-28 出版日期:2008-09-20 网络出版日期:2008-09-20

BST Patterned Films Prepared by Direct Patterning Process and Their Properties

ZHANG Wei-Hua, YUAN Yuan, SHI Chun-Mei, ZHAO Gao-Yang

The Faculty of Material Science and Engineering, Xi’an University of Technology, Xi’an 710048, China

Received:2007-10-15 Revised:2007-12-28 Published:2008-09-20 Online:2008-09-20

摘要/Abstract

摘要： 采用改进的化学修饰的溶胶-凝胶工艺, 以聚乙烯吡咯烷酮(PVP)为薄膜开裂抑制剂, 以乙酰丙酮为化学修饰剂, 利用乙酰丙酮可以与金属盐形成的配位螯合物的特性, 制备了具有紫外光感光特性的钛酸锶钡(Ba_0.8Sr_0.2TiO₃)前驱溶胶及其凝胶薄膜; 结合直接感光法, 首先制备图形化凝胶薄膜, 再通过后续热处理, 在Pt/TiO₂/SiO₂/Si衬底上最终得到了具有钙钛矿结构的钛酸锶钡图形化薄膜, 其图形厚度约为793nm, 相对介电常数约为600, 介电损耗约为0.03.

关键词: BST薄膜, 感光性, 微细图形, 溶胶-凝胶工艺

Abstract: The ultraviolet light photosensitive Ba_0.8Sr_0.2TiO₃ (BST) sol and gel films were prepared by using chemical modification and modified sol-gel process with polyvinylpyrrolidone (PVP) as crack-suppressing agent, and acetylacetone (AcAcH) as chemical modifier agent which can associate metal-salt to form coordination chelate. The BST patterned gel films were prepared by irect patterning process. Then the BST patterned films with perovskite structure on Pt/TiO₂/SiO₂/Si substrate were obtained after subsequent heat treatment. The thickness of the BST patterned film is about 793nm, the dielectric constant and dielectric loss of the BST patterned film are about 600 and 0.03, respectively.

Key words: BST Thin Film, photosensitivity, fine patterning, sol-gel process

中图分类号:

TN104
TN305

张卫华,袁媛,石春梅,赵高扬. 直接感光法制备钛酸锶钡图形化薄膜及其性能研究[J]. 无机材料学报, DOI: 10.3724/SP.J.1077.2008.00886.

ZHANG Wei-Hua,YUAN Yuan,SHI Chun-Mei,ZHAO Gao-Yang. BST Patterned Films Prepared by Direct Patterning Process and Their Properties[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2008.00886.

[1]	张黄莉,赵高扬,彭海军. 溶胶—凝胶法制备YBCO超导薄膜微细图形[J]. 无机材料学报, 2009, 24(1): 192-194.
[2]	潘瑞琨,王军,董秀梅,章天金,胡兰,江娟. 掺Ho³⁺钛酸锶钡薄膜的结构及发光性能研究[J]. 无机材料学报, 2008, 23(5): 902-906.
[3]	周歧刚,翟继卫,姚熹. Mn-Mg共掺杂对钛酸锶钡薄膜介电性能的影响[J]. 无机材料学报, 2007, 22(3): 519-523.
[4]	黄祥卉,陈振华. γ-Fe₂O₃/SiO₂纳米复合粉体的制备[J]. 无机材料学报, 2005, 20(3): 685-691.
[5]	张卫华,赵高扬. 钇稳定氧化锆薄膜的制备及其微细加工[J]. 无机材料学报, 2004, 19(2): 424-428.
[6]	杨觉明,周万城,包小平,陈平. 成分对烧结BAS(BaAl₂Si₂O₈)凝胶玻璃形成的影响[J]. 无机材料学报, 2003, 18(6): 1187-1191.
[7]	于云,何超,陈新彪,王振红,胡行方,LARBOTAndré. 多孔γ-Al₂O₃过渡膜的结构与性能研究[J]. 无机材料学报, 2002, 17(6): 1277-1282.
[8]	张勤俭,张建华,李敏,张勤河,秦勇. 溶胶-凝胶Al₂O₃-ZrO₂涂层与工程陶瓷的界面结构[J]. 无机材料学报, 2002, 17(1): 185-188.
[9]	叶扬,丁爱丽,唐新桂,罗维根. Ba_0.7Sr_0.3TiO₃薄膜的制备、结构及性能研究[J]. 无机材料学报, 2002, 17(1): 125-130.
[10]	阳生红,李辉遒,张曰理,莫党,田虎永,罗维根,蒲兴华,丁爱丽. Ba_0.9Sr_0.1TiO₃薄膜的椭偏光谱研究[J]. 无机材料学报, 2001, 16(2): 305-310.
[11]	金承钰,丁永平,孟中岩. Sol-Gel法制备Ba_xSr_1-xTiO₃铁电薄膜化学机制的探讨[J]. 无机材料学报, 2000, 15(2): 287-292.

直接感光法制备钛酸锶钡图形化薄膜及其性能研究

BST Patterned Films Prepared by Direct Patterning Process and Their Properties

PDF (PC)

可视化

被引次数

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 11

编辑推荐

Metrics

本文评价