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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

用压痕试验法研究CVD金刚石膜的粘附性能

匡同春+; 刘正义+; 周克崧; 代明江; 王德政   

  1. 华南理工大学; 广州510641; 广州有色金属研究院;广州 510651
  • 收稿日期:1997-01-29 修回日期:1997-03-11 出版日期:1998-02-20 网络出版日期:1998-02-20

Application of Indentation Test Method in Investigating Adhesion Properties of Chemical Vapor Deposited Diamond Films

KUANG Tong-Chun+; LIU Zheng-Yi+; ZHOU Ke-Song; DAI Ming-Jiang; WAN De-Zheng   

  1. South China University of Technology Guangzhou 510641 China； Guangzhou Research Institute of Non-Ferrous Metals Guangzhou 510651 China
  • Received:1997-01-29 Revised:1997-03-11 Published:1998-02-20 Online:1998-02-20

PDF (PC)

970

被引次数

37

摘要： 在观察与分析压入过程中CVD金刚石膜开裂方式的基础上，初步探讨了用压痕试验法评定CVD金刚石膜粘附性能的可行性．采用反映膜／基粘附性能的临界开裂或剥落载荷Per和抗裂性参数dP／dX两指标评定了硬质合金基体表面经不同预处理方法和沉积工艺参数合成的金刚石膜的粘附性能；研究了粘附性能指标与沉积工艺参数（如甲烷浓度、沉积气压、沉积功率）之间的关系．适当的表面预处理、适中的甲烷浓度、较低的沉积气压、较高的沉积功率均有利于改善金刚石膜的粘附性能．

关键词: 压痕试验法, CVD金刚石膜, 粘附性能, 残余应力

Abstract: The feasibility of using the indentation test method to evaluate the adhesion property of chemical vapor deposited diamond film was investigated initially
on the basis of observations and analyses of the cracking or delamination ways of diamond films under indentation. The critical load for lateral crack initiation or
peeling-off (Pcr) and the cracking resistance (dP/dX), two useful adhesion parameters, were used to characterize the adhesion properties of diamond
films synthesized by various pretreatment methods and deposition process parameters. The relationships between adhesion properties and methane concentrations, deposition
pressures, deposition powers and residual stresses were studied. Adhesion properties of diamond films can be improved using proper pretreatment of substrate surface,
suitable methane concentration, lower deposition pressure and higher deposition power.

Key words: indentation test method, CVD diamond film, adhesion property, residual stress

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