等离子喷涂-物理气相沉积Si/莫来石/Yb2SiO5环境障涂层

doi:10.15541/jim20170194

无机材料学报 ›› 2018, Vol. 33 ›› Issue (3): 325-330.DOI: 10.15541/jim20170194

等离子喷涂-物理气相沉积Si/莫来石/Yb₂SiO₅环境障涂层

张小锋^{1, 2}, 周克崧^{1, 2}, 刘敏², 邓春明², 牛少鹏², 许世鸣²

1. 华南理工大学材料科学与工程学院, 广州510640;
2. 广东省新材料研究所, 现代材料表面工程技术国家工程实验室, 广东省现代表面工程技术重点实验室, 广州 510650

收稿日期:2017-04-21 修回日期:2017-06-30 出版日期:2018-03-20 网络出版日期:2018-03-12
作者简介:张小锋(1986-), 男, 博士, 工程师. E-mail: zxf200808@126.com
基金资助:
广东省科学院项目(2017GDASCX-0843);广东省科技计划(201313050800031, 201413050502008, 2014B070706026, 2013B061800053);广东省自然科学基金团队项目(2016A030312015)

Preparation of Si/Mullite/Yb₂SiO₅ Environment Barrier Coating (EBC) by Plasma Spray-Physical Vapor Deposition (PS-PVD)

ZHANG Xiao-Feng^{1, 2}, ZHOU Ke-Song^{1, 2}, LIU Min², DENG Chun-Ming², NIU Shao-Peng², XU Shi-Ming²

1. School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China;
2. National Engineering Laboratory for Modern Materials Surface Engineering Technology & the Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510650, China;

Received:2017-04-21 Revised:2017-06-30 Published:2018-03-20 Online:2018-03-12
About author:ZHANG Xiao-Feng. E-mail: zxf200808@126.com
Supported by:
Guangdong Academy of Sciences (2017GDASCX-0843);Guangdong Technical Research Program (201313050800031, 201413050502008, 2014B070706026, 2013B061800053);Guangdong Natural Science Foundation (2016A030312015)

摘要/Abstract

摘要：

采用等离子喷涂-物理气相沉积技术(PS-PVD)在SiC/SiC复合材料表面依次制备了Si(底层)、3Al₂O₃-2SiO₂ (中间层)、Yb₂SiO₅(面层)环境障涂层(EBC)。利用扫描电子显微镜(SEM)观察分析EBC涂层表面与界面的微观形貌, X射线衍射仪对喷涂过程中易非晶化的莫来石涂层进行物相分析, 研究了喷涂粉末与高温等离子体的相互作用并探讨了EBC涂层的沉积机制。结果表明：通过PS-PVD技术可制备出低孔隙率、高致密界面的EBC涂层。通过观察EBC涂层表面, Si涂层表面无裂纹, 而莫来石和Yb₂SiO₅涂层表面均发现有微裂纹, 其中莫来石涂层表面的裂纹尺度大于Yb₂SiO₅涂层。三层结构的致密EBC涂层以液相沉积为主, 同时伴随有气、固沉积。在Yb₂SiO₅涂层沉积过程中, 液相沉积导致涂层为致密的层状结构, 蒸发后气相在等离子焰流中及基体表面发生均匀形核和非均匀形核导致涂层中出现大量的纳米晶粒, 而微熔粒子和溅射粒子则形成涂层中亚微米、微米晶粒。

关键词: 等离子喷涂-物理气相沉积, 环境障涂层, 硅酸镱

Abstract:

Environmental barrier coating (EBC) Si/3Al₂O₃-2SiO₂/Yb₂SiO₅ was prepared by plasma spray-physical vapor deposition (PS-PVD) on SiC/SiC ceramic matrix composites. The surface and interface of tri-layered EBC were characterized by SEM. And the phase transformation of the mullite coating was analyzed by XRD. The interaction of feedstock powder and high temperature plasma jet was investigated. Furthermore, the deposition mechanism of EBC was studied. Experimental results dermonstrated that EBC with low porosity and good bonding can be obtained by PS-PVD. EBC withont micro-crack was observed on the surface of Si coating in contrast to coating mullite and Yb₂SiO₅ coating. The size of crack in mullite surface was larger than that in Yb₂SiO₅ coating. Low porous EBC was deposited by liquid droplet accompanied by gas and solid state through PS-PVD. Yb₂SiO₅ coating was dense and formed laminar structure, mainly resulting from liquid droplet deposition. Additionally, nano-grains were observed in Yb₂SiO₅ coating which resulted from both homogeneous and heterogeneous nucleation of vapor phase. And sub-micron/micron grains were obtained from semi-molten and splashed particles.

Key words: plasma spray-physical vapor deposition, environmental barrier coating, Yb₂SiO₅

中图分类号:

TQ174

张小锋, 周克崧, 刘敏, 邓春明, 牛少鹏, 许世鸣. 等离子喷涂-物理气相沉积Si/莫来石/Yb₂SiO₅环境障涂层[J]. 无机材料学报, 2018, 33(3): 325-330.

ZHANG Xiao-Feng, ZHOU Ke-Song, LIU Min, DENG Chun-Ming, NIU Shao-Peng, XU Shi-Ming. Preparation of Si/Mullite/Yb₂SiO₅ Environment Barrier Coating (EBC) by Plasma Spray-Physical Vapor Deposition (PS-PVD)[J]. Journal of Inorganic Materials, 2018, 33(3): 325-330.

图/表 8

图1 (a)Si粉末, (b)莫来石团聚粉末和(c)Yb2SiO5团聚粉末的形貌

Fig. 1 Micrographs of (a) Si powders, (b) agglomerated mullite powders and (c) agglomerated Yb2SiO5 powders

图2 (a)喷涂前和(b)喷涂后样品表面的SEM照片

Fig. 2 Surface SEM images of (a) original sample and (b) EBC sample

图3 (a)EBC涂层断面, (b)Yb2SiO5/莫来石涂层界面, (c)莫来石/Si涂层界面和(d)Si/基体界面的SEM照片

Fig. 3 SEM images of (a) cross-section of EBC, (b) interface of Yb2SiO5 and mullite coating, (c) interface of mullite and Si coating and (d) interface of Si and substrate

图4 粉末和涂层的XRD图谱

Fig. 4 XRD patterns of powders and coatings (a1) Mullite powders; (a2) Mullite coating; (b1) Yb2SiO5 powders; (b2) Yb2SiO5 coating

图5 EBC涂层表面形貌

Fig. 5 Surface microstructures of EBC coating(a) Si coating; (b) Mullite coating; (c) Yb2SiO5 coating

表1 Si、3Al2O3-2SiO2和Yb2SiO5粉末的配位数、熔点和膨胀系数

Table 1 Coordination number, melting point and coefficient of thermal expansion of Si, 3Al2O3-2SiO2 and Yb2SiO5

Materials	Coordination number	Melting point /℃	Coefficient of thermal expansion at 100℃/×10^-⁶℃
C/SiC	-	2827	4.5-5.5
Si	4	1410	3.5-4.5
3Al₂O₃-2SiO₂	8	1830	6.5-7.0
Yb₂SiO₅	8	2000	6.8-7.3

图6 (a)Yb2SiO5团聚前原始粉末和(b, c) Yb2SiO5涂层区域的形貌

Fig. 6 Micrographs of (a) mullite powders, (b, c) partial surface of mullite coating

图7 PS-PVD涂层沉积示意图

Fig. 7 Schematic diagram of coating deposition by PS-PVD

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等离子喷涂-物理气相沉积Si/莫来石/Yb₂SiO₅环境障涂层

Preparation of Si/Mullite/Yb₂SiO₅ Environment Barrier Coating (EBC) by Plasma Spray-Physical Vapor Deposition (PS-PVD)

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