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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Effects of Working Pressure on the Structure and Electrical Properties of AlScN Thin Films
SUI Jinyang, ZHOU Dayu, ZHAO Wenjin, TONG Yi, WANG Xinpeng
Journal of Inorganic Materials . 2026, (
4
): 486 -492 . DOI: 10.15541/jim20250344
