Nitrogen Vacancy Regulated Lattice Distortion on Improvement of (NbMoTaW)Nx Thin Films: Mechanical Properties and Wear Resistance
ZHANG Rui, ZHANG Kan, YUAN Mengya, GU Xinlei, ZHENG Weitao
Journal of Inorganic Materials . 2024, (6): 715 -725 .  DOI: 10.15541/jim20230564