Fabrication of 8-inch N-type 4H-SiC Single Crystal Substrate with Low Dislocation Density
XIONG Xixi, YANG Xianglong, CHEN Xiufang, LI Xiaomeng, XIE Xuejian, HU Guojie, PENG Yan, YU Guojian, HU Xiaobo, WANG Yaohao, XU Xiangang
Journal of Inorganic Materials
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2023, (11): 1371
-1372
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DOI: 10.15541/jim20230325
