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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Surface Modified Alumina Particles and Their Chemical Mechanical Polishing (CMP) Behavior on C-plane (0001) Sapphire Substrate
WANG Wei-Lei, LIU Wei-Li, BAI Lin-Sen, SONG Zhi-Tang, HUO Jun-Chao
Journal of Inorganic Materials . 2017, (
10
): 1109 -1114 . DOI: 10.15541/jim20170036
