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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Stress Induced Microstructure Evolution of AlN: Er Film at Different Annealing Temperature
YANG Ming-Ming, MO Ya-Juan, WANG Xiao-Dan, ZENG Xiong-Hui, LIU Xue-Hua, HUANG Jun, ZHANG Ji-Cai, WANG Jian-Feng, XU Ke
Journal of Inorganic Materials . 2016, (
3
): 285 -290 . DOI: 10.15541/jim20150399
