Microstructure Controlling and Properties of TiAlSiN Nanocomposite Coatings Deposited by Modulated Pulsed Power Magnetron Sputtering
WU Zhi-Li, LI Yu-Ge, WU Bi, LEI Ming-Kai
Journal of Inorganic Materials . 2015, (12): 1254 -1260 .  DOI: 10.15541/jim20150096