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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Influence of Substrate Temperature on the Morphology, Composition and Growth Rate of SiC Films Deposited by PECVD
YU Fang-Li, BAI YU, QIN Yi, YUE Dong, LUO Cai-Jun, YANG Jian-Feng
Journal of Inorganic Materials . 2013, (
2
): 201 -206 . DOI: 10.3724/SP.J.1077.2013.12203
