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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Fabrication and Characterization of Silicon Nanoparticles Embedded in SiN
x
Films
JIANG Li-Hua, ZENG Xiang-Bin, ZHANG Xiao, ZENG Yu
Journal of Inorganic Materials . 2011, (
8
): 802 -806 . DOI: 10.3724/SP.J.1077.2011.00802
