Effect of RapidThermal Annealing on Structural And and Electrical characteristics Characteristics of Ni-Al-O gate Gate dielectrics Dielectrics
LI Man, LIU Bao-ting,WANG Yu-qiang,WANG Kuan-mao
Journal of Inorganic Materials . 2011, (3): 257 -260 .  DOI: 10.3724/SP.J.1077.2011.00257