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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
High-speed Deposition of Oriented TiN
x
Films by Laser Metalorganic Chemical Vapor Deposition
GONG Yan-Sheng,TU Rong,GOTO Takashi
Journal of Inorganic Materials . 2010, (
4
): 391 -395 . DOI: 10.3724/SP.J.1077.2010.00391
