Undoped and Mn-Mg co-doped barium strontiun titanate (Ba0.25Sr0.75TiO3) thin films were deposited on Pt/Ti/SiO2/Si substrates by a sol-gel technique. X-ray diffraction (XRD) analysis and FE- SEM reveal that the films exhibite a pure perovskite phasestructure, uniform grain sizes and crack-fee. The dielectric constant, loss, tunability and leakage current density are 200, 0.010, 38%, 1×10 -5 A/cm 2, respectively, at a 1mol% Mn-Mg content. The improved BST thin films can be used for tunable microwave devices.
ZHOU Qi-Gang
,
ZHAI Ji-Wei
,
YAO Xi
. Influence of Mn-Mg Co-doping on the Dielectric Properties of Barium Strontiun
Titanate Thin Film[J]. Journal of Inorganic Materials, 2007
, 22(3)
: 519
-523
.
DOI: 10.3724/SP.J.1077.2007.00519
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