Abstract: MgxZn{1-xO films (x=0.23) were prepared on silicon substrates by radio frequency magnetron sputtering at 80℃. The structure properties of Mg_xZn_1-xO films were
studied by using XRD, HRTEM, Raman spectra and AFM. The analyses of XRD and HRTEM indicate that the Mg_xZn_1-xO films have hexagonal wurtzite
single-phase structure and a preferred orientation with c axis perpendicular to the substrates. The lattice constants of Mg_xZn_1-xO films are similar to those of ZnO films. Raman spectra of ZnO and Mg_xZn_1-xO films reveal
that the Mg_xZn_1-xO films have not only hexagonal wurtzite structure, but also higher crystalline quality than ZnO films. AFM image indicates
that the Mg_xZn_1-xO films are polycrystalline.

Key words: Mg_xZn_1-xO, radio frequency magnetron sputtering, structure properties