X-ray Photoelectron Spectroscopy Studies of ITO Thin Films

Abstract

Abstract: The chemical states of In, Sn and O in Sn-doped In2O3 films were investigated byusing X-ray photoelectron spectroscopy. The results indicate that Sn and In respectively exist ina same chemical state for both as-deposited and post-annealed films. Two types of O2- ions, OI and OII, can be distinguished by Gaussian simulation. OI has a binding energy of 529.90±0.30 eVwhich is in oxygen sufficient region, and OII has a binding energy of 531.40±0.2 eV which is inoxygen deficient regions. Oxygen deficient regions mainly exist in the surface layer.

Key words: chemical state, XPS, Gaussian simulation

CLC Number:

O484

CHEN Meng,PEI Zhi-Liang,BAI Xue-Dong,HUANG Rong-Fang,WEN Li-Shi. X-ray Photoelectron Spectroscopy Studies of ITO Thin Films[J]. Journal of Inorganic Materials.

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X-ray Photoelectron Spectroscopy Studies of ITO Thin Films

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