Abstract: Cubic boron nitride (cBN) is an important compound of the Ⅲ-Ⅴ group. It attracts much interest for years around the world due to its excellent
properties which are similar to or prior to those of diamond. The fabrication and properties investigation of cBN is one of the attractions
to materials researches for decades. In this paper, the fabrication of cBN films by ECR CVD technique assisted with a hot filament was reported.
The results show that negative bias is not the unique factor for formation of cBN, the active particles is also an essential factor.

Key words: cBN, ECR CVD, hot filament