Improvement on Size Uniformity of SiO2 Nanospheres Applied in Si Optical Resonance Nanopillar-arrays

doi:10.15541/jim20180440

Abstract

Abstract:

Recently, optical resonances of nanostructured semiconductor were proved highly effective for light management in many optoelectronic devices. In this work, the monodispersed silica nanospheres with particle sizes of 270-330 nm were synthesized by modified two-step Stober method, and the nanosphere size uniformity was improved by optimizing the synthesis conditions. Then, the as-prepared nanospheres were self-assembled into monolayer as etching mask on the silicon substrate by means of constant temperature heating and evaporation. Finally, Si nanopillar-arrays were fabricated by inductively coupled plasma etching. The light reflectance spectra show that the fabricated Si nanopillar-arrays with diameters of 300-325 nm can excite the quadrupole Mie resonance, and the reflectance of lower than 5% was obtained in visible wavelengths, which show excellent light management performances and can further match the requirements of actual optoelectronic devices.

Key words: self-assembly nanosphere, nanopillar-array, optical resonance

CLC Number:

TN204

PENG Xin-Cun, WANG Zhi-Dong, ZENG Meng-Si, LIU Yun, ZOU Ji-Jun, ZHU Zhi-Fu, DENG Wen-Juan. Improvement on Size Uniformity of SiO₂ Nanospheres Applied in Si Optical Resonance Nanopillar-arrays[J]. Journal of Inorganic Materials, 2019, 34(7): 734-740.

Figures/Tables 6

Fig. 1 Fabrication process of Si nanopillar-arrays by self- assembled nanosphere etching

Fig. 2 Fabrication process of the monodisperse SiO2 nanospheres by two-step Stober method

Fig. 3 (a) Effect of ammonia amount on particle size distribution of nanospheres; (b) Effect of TEOS amount on particle size distribution of nanospheres; (c) Fusion of the nanospheres found in the SEM image; (d) Particle size distribution of the SiO2 nanosphere seed solution under the optimized synthesis condition

Fig. 4 Effect of the last-step reaction time of the two-step Stober method on uniformity of SiO2 nanospheres: (a) 1 h, (b) 2 h, (c) 3 h, (d) 4 h, (e) 5 h ; (f) Dependence of the average particle size and its distribution on reaction time; (g) SEM image of the SiO2 nanospheres with reaction time of 4 h

Fig. 5 (a) SEM image of the single-layer SiO2 nanosphere on Si substrate (top view) and SEM images of the Si nanopillar-arrays from (b) top view and (c) side view

Fig. 6 (a) Measured area for the light reflectance spectrum and (b) surface reflectance spectra of Si nanopillar-array samples

References 29

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Improvement on Size Uniformity of SiO₂ Nanospheres Applied in Si Optical Resonance Nanopillar-arrays

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