Fabrication of Transparent Conductive Al-doped ZnO Thin Films by Aerosol-assisted Chemical Vapour Deposition

doi:10.3724/SP.J.1077.2011.00607

Journal of Inorganic Materials ›› 2011, Vol. 26 ›› Issue (6): 607-612.DOI: 10.3724/SP.J.1077.2011.00607

• Research Paper • Previous Articles Next Articles

Fabrication of Transparent Conductive Al-doped ZnO Thin Films by Aerosol-assisted Chemical Vapour Deposition

QIN Xiu-Juan^1,2, HAN Si-Hui-Zhi¹, ZHAO Lin¹, ZUO Hua-Tong¹, SONG Shi-Tao³

(1. College of Environmental and Chemical Engineering, Yanshan University, Qinhuangdao 066004, China; 2. State Key Laboratory of Metastable Materials Science and Technology, Qinhuangdao 066004, China; 3. College of Physics and Chemistry, Hebei Normal University of Science and Technology, Qinhuangdao 066004, China)

Received:2010-08-19 Revised:2010-10-03 Published:2011-06-20 Online:2011-06-07
Supported by:
Natural Science Foundation of Hebei Province (B200800758)

Abstract

Abstract: Al-doped ZnO thin films were prepared by aerosol-assisted chemical vapour deposition (AACVD) on glass substrates. The effect of Al content (2at%-8at%) on the structural, optical and electrical properties of Al-doped ZnO thin films was investigated in detail. The samples were tested by XRD, SEM, EDAX and UV-Vis spectrophotometer. The results indicate that the AZO films have a hexagonal (wurtzite) structure without preferential orientation along c-axis, and however no Al related phases are observed. The average transmittances of the AZO film is over 72% in the visible regions. The optical band gap for the AZO films becomes narrow with the increasing Al dopant. The four-point probe technique is used to characterize thin films electrically. The data shows that Al dopant decrease the sheet resistance. The ZnO films doped with 6at% Al exhibit a minimum of sheet resistance (18Ω/□).

Key words: aerosol, chemical vapour deposition, Al-doped ZnO, transparent conductive thin films

CLC Number:

O484

QIN Xiu-Juan, HAN Si-Hui-Zhi, ZHAO Lin, ZUO Hua-Tong, SONG Shi-Tao. Fabrication of Transparent Conductive Al-doped ZnO Thin Films by Aerosol-assisted Chemical Vapour Deposition[J]. Journal of Inorganic Materials, 2011, 26(6): 607-612.

References

[1] Oda J, Nomoto J, Miyata T, et al. Improvements of spatial resistivity distribution in transparent conducting Al-doped ZnO thin films deposited by DC magnetron sputtering. Thin Solid Films, 2010, 518(11): 2984-2987.

[2] Tsai Y Z, Wang N F, Tsai C L, Heavens S N, et al. Fluorine-doped ZnO transparent conducting thin films prepared by radio frequency magnetron sputtering. Thin Solid Films, 2010, 518(17): 4955-4959.

[3] Wellings J S, Chaure N B, Heavens S N, et al. Growth and characterization of electrodeposited ZnO thin films. Thin Solid Films, 2008, 516(12): 3893-3898.

[4] Preetam Singh, Ajay Kaushal, Davinder Kaur. Mn-doped ZnO nanocrystalline thin films prepared by ultrasonic spray pyrolysis. Journal of Alloys and Compounds, 2009, 471(1/2): 11-15.

[5] Sahal M, Hartiti B, Ridah A,et al. Structural, electrical and optical properties of ZnO thin films deposited by Sol-Gel method. Microelectronics Journal, 2008, 39(6): 1425-1428.

[6] 陈新亮, 薛俊明, 张德坤, 等(CHEN Xin-Liang, et al). 衬底温度对MOCVD法沉积ZnO透明导电薄膜的影响. 物理学报(Acta Physica Sinica), 2007, 56(3): 1563-1567.

[7] 高珊, 谷景华, 张跃(GAO Shan, et al). 溶剂热法制备铝掺杂的氧化锌透明导电薄膜.无机化学学报(Chinese J. Inorg. Chem.), 2010, 26(1): 55-60.

[8] Tahir A A, Wijayantha K G U, Mazhar M, et al. ZnFe2O4 thin films from a single source precursor by aerosol assisted chemical vapour deposition. Thin Solid Films, 2010, 518(14): 3664-3668.

[9] Piccirillo C, Binions R, Parkin I P. Synthesis and characterization of W-doped VO2 by aerosol assisted chemical vapour deposition. Thin Solid Films, 2008, 516(8): 1992-1997.

[10] Venkatachalam S, Iida Y, Kanno Y. Preparation and characterization of Al doped ZnO thin films by PLD. Superlattices and Microstructures, 2008, 44(1): 127-135.

[11] Sahu D R, Lin S Y, Huang J L. Improved properties of Al-doped ZnO film by electron beam evaporation technique. Microelectronics Journal, 2007, 38(2): 245-250.

[12] Liu H X, Qiu H, Chen X, et al. Structural and physical properties of ZnO:Al films grown on glass by direct current magnetron sputtering with the oblique target. Current Applied Physics, 2009, 9(6): 1217-1222.

[13] Liu C P, Jeng G R. Properties of aluminum doped zinc oxide materials and sputtering thin films. Journal of Alloys and Compounds, 2009, 468(1/2): 343-349.

[14] Wang M S, Lee K E, Hahn S H, et al. Optical and photoluminescent properties of Sol-Gel Al-doped ZnO thin films. Materials Letters, 2007, 61(4/5): 1118-1121.

[15] Babu B J, Maldonado A, Velumani S, et al. Electrical and optical properties of ultrasonically sprayed Al-doped zinc oxide thin films. Materials Science and Engineering B, 2010, 174(1/2/3): 31-37.

[16] Emin Bacaksiz, Serder Aksu, Yllmaz S, et al. Structural, optical and electrical properties of Al-doped ZnO microrods prepared by spray pyrdysis. Thin Solid Films, 2010, 518(15): 4076-4080.

[17] 兰伟, 唐国梅, 曹文磊, 等(LAN Wei, et al). Ni掺杂ZnO薄膜的结构与光学特性研究. 物理学报(Acta Physica Sinica), 2009, 58(12): 8501-8505.

[18] Saha B, Das S, Chattopadhyay K K. Electrical and optical properties of Al doped cadmium oxide thin films deposited by radio frequency magnetron sputtering. Solar Energy Material & Solar Cells. 2007, 91(18): 1692-1697.

[19] 伞海生, 李斌, 冯博学, 等(SAN Hai-Sheng, et al). 由缺陷引起的Burstein-Moss 和带隙收缩效应对CdIn2O4透明导电薄膜光带隙的影响.物理学报(Acta Physica Sinica), 2005, 54(2): 842-847.

[20] Rusu G G, R-mbu A P, Buta V E, et al. Structural and optical charactetization of Al-doped ZnO films prepared by thermal oxidation of evaporated Zn/Al multilayered films. Materials Chemistry and Physics, 2010, 123(1): 314-321.

[21] 陈兆权, 刘明海, 刘玉萍, 等(CHEN Zhao-Quan, et al). PECVD制备AZO(ZnO:Al)透明导电薄膜. 物理学报(Acta Physica Sinica), 2009, 58(6): 4260-4267.

Fabrication of Transparent Conductive Al-doped ZnO Thin Films by Aerosol-assisted Chemical Vapour Deposition

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