Journal of Inorganic Materials

• Research Letter • Previous Articles     Next Articles

A Transparent PN Junction Based on Tin-antimony Oxide Films

JI Zhen-Guo1,2, ZHOU Rong-Fu1, MAO Qi-Nan2, HUO Li-Juan2, CAO Hong2   

  1. (1. Institute of Electronic Information, Hangzhou Dianzi University, Hangzhou 310018, China; 2. State Key Laboratory for Silicon Materials, Zhejiang University, Hangzhou 310027, China)
  • Received:2009-03-31 Revised:2009-06-17 Published:2009-11-20 Online:2010-04-22

Abstract: Transparent and semiconductive tin-antimony oxide (TAO) films were fabricated by reactive DC magnetron sputtering. According to the results of Hall effect measurement, TAO films are p-type for Sn/Sb atomic ratio in the range of 0.22-0.33, while TAO films with Sn/Sb atomic ratio out of this range are n-type. Optical band-gap measurement results show that the bandgap of all TAO films with various Sn/Sb ratios is almost identical (~3.91eV). Finally, a PN junction based on n-TAO and p-TAO was fabricated using ITO as the electrode for n-TAO and a thin layer of Cu as the electrode for p-TCO. It shows typical rectifying characteristics of a homo-junction diode since both types of TAO films have almost the same band-gap values.

Key words: transparent semiconductive films, antimony-tin oxide, PN junction

CLC Number: